Suitable for overall thickness inspection of silicon wafers and compound semiconductor samples (GaAs, InP, SiC, GaN) and parameter inspection such as TTV/BOW/Warp warpage. The equipment is compatible with both transparent and opaque wafers. It uses a non-contact measurement method that is precise and fast. Using a white-light source with an upper and lower dual-probe design, the sample is placed between the two probes during testing, and one test quickly provides all information related to sample thickness and geometric parameters: thickness, TTV, Bow, Warp, TIR, LTV, etc. The equipment can also be equipped with infrared interference probes. 01 Fully automatic measurement Extremely simple operation, easy online programming settings, automatic measurement, Mapping mode supported; 02 Powerful measurement functions One test can simultaneously obtain all data: thickness, TTV, Bow, Warp, TIR, LTV, etc.; 03 Fast measurement speed Supports flying-spot sampling, quickly completing measurements and saving production time; 04 Wide application scenarios The APS series can adapt to many different products, scenarios and needs, providing you with the optimal solution
Thickness, warpage, TTV, Bow, Warp; application examples: 3D dimensions wafer-thickness glass substrate-thickness sapphire glass-thickness; thickness 6-inch lithium niobate crystal-TTV 8mm diamond-TTV 8-inch SI-TTV 12-inch SI-TTV 12-inch glass-TTV 12-inch etched wafer-TTV 300X300 glass-TTV 8-inch SiC-TTV diamond wafer-TTV/Warp/Bow
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Banshi Intelligent Technology (Shenzhen) Co., Ltd., a national-level specialized and sophisticated "Little Giant" and high-tech enterprise, focuses on providing precision measuring instruments and semiconductor metrology equipment to global customers.
Currently, Banshi Intelligent provides stable and reliable services to many well-known enterprises such as Huawei HiSilicon, CATL, II-VI, Accelink, Bozhon, Chinese Academy of Sciences, AT&S, Shennan Circuits, Kinwong, and Huatian Technology.
With the mission of "Exploring the future of humanity with precision measurement" and the vision of "Becoming a leader in precision measurement", Banshi Intelligent will continue to innovate in the fields of precision measurement and semiconductor metrology, redefining the connotation of "Intelligent Manufacturing in China" with product technology, and contributing Banshi's strength to the rise of Chinese instruments.
Atometrics · Detection with Heart
A brand under Banshi Intelligent
"Atometrics" has launched multiple high-precision measurement products such as white light interferometers, flash testers, ultra-depth-of-field microscopes, line laser sensors, point laser sensors, spectral confocal displacement sensors, line spectral displacement sensors, wafer 3D metrology, and packaging substrate 3D automatic inspection equipment.
They have been widely used in semiconductors, aerospace, 3C electronics, 5G communications, new energy, biomedical and other fields.
Providing customers with high-quality products and services is our unremitting pursuit. Our team of world's top scientists and experienced engineers is a key advantage to ensure customer success.