Removal Function Measurement Instrument
Technical characteristics: absolute accuracy PV<6nm (@60mm aperture), single test ≤1 second, design life >100,000 hours, modular design, supports machine-embedded installation.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Optical System - Effective Aperture | Φ60mm (covering the typical removal function area) |
| Optical System - Operating Wavelength | 635nm (semiconductor laser) (high cost-performance) |
| Absolute Surface Figure Accuracy (PV) | <6 nm (traceable calibration) |
| Repeatability (RMS) | <0.8 nm (3σ confidence) |
| Performance Spec - Single Test Time | ≤1 second (including data processing and transfer) |
| Performance Spec - Maximum Sampling Density | 1024×1024 pixels (area detail resolution 0.06mm/pix) |
| Reliability - Mean Time Between Failures (MTBF) | ≥50,000 hours (MIL-HDBK-217F certified) |
| Reliability - Environmental Adaptability | 15-35°C, humidity 30%-70% (no constant temperature/humidity requirement) |
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Datasheet
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Supplier Information
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