REI130SL/SLE Sub-Micron Linear Positioning Stage

REI130SL/SLE Sub-Micron Linear Positioning Stage

Supplier
Cnbhc
Part Number
REI130SL/SLE
Category
Optical platform
Origin
China

The REI130SL/SLE sub-micron linear positioning stage combines the outstanding micro-displacement motion characteristics of crossed-roller guideways with ground screws, delivering excellent motion performance. A variety of optimized feature options give REI_SL/SLE extremely high quality, making it the ideal choice for high-performance applications. The REI130SL/SLE offers excellent geometric performance and minimal angular error, with standard travels up to 200 mm, and outstanding minimum incremental step and positioning stability. The series features a wide range of standard functions and available options and can be integrated into larger subsystems or equipment or used as an independent positioning axis; it can be mounted on optical platforms, and the moving carriage features a versatile standard customer mounting interface; brushless slotless servo motors (with or without brakes) and stepper motors are available. The standardized universal mounting pattern facilitates system integration; two, three or more axes can be combined for multi-axis configurations, and the stages can also be used for Z-axis drive; a brake can be added for power-off protection.

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Overview

The REI130SL/SLE sub-micron linear positioning stage combines the outstanding micro-displacement motion characteristics of crossed-roller guideways with ground screws, delivering excellent motion performance. A variety of optimized feature options give REI_SL/SLE extremely high quality, making it the ideal choice for high-performance applications. The REI130SL/SLE offers excellent geometric performance and minimal angular error, with standard travels up to 200 mm, and outstanding minimum incremental step and positioning stability. The series features a wide range of standard functions and available options and can be integrated into larger subsystems or equipment or used as an independent positioning axis; it can be mounted on optical platforms, and the moving carriage features a versatile standard customer mounting interface; brushless slotless servo motors (with or without brakes) and stepper motors are available. The standardized universal mounting pattern facilitates system integration; two, three or more axes can be combined for multi-axis configurations, and the stages can also be used for Z-axis drive; a brake can be added for power-off protection.

Specifications

ParameterValue
Travel50; 100; 150mm
Screw Lead2mm
Straightness1.5μm
Flatness2.5μm
Roll8arc sec
Yaw6arc sec
Maximum Speed100mm/s
Traceability For CalibrationISO230-2 or GB17421, 往返5次, ≥10Plot/L

Applications

High-precision motion applications such as vertical positioning of sensors and cameras, optical focusing, and optical interferometry; can be used as an independent positioning axis or integrated into multi-axis subsystems, and can also be used for Z-axis drive.

Key Features

130 mm load carriage with travels covering 50-200 mm; C3/C1 precision ground ball screw drive for fast, accurate positioning; excellent axis accuracy with extremely low sliding friction; direct position feedback and full closed-loop control for outstanding positioning capability; standard and rich multi-function options for rapid integration or use as an independent motion axis.

Datasheet

Product Datasheet
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Supplier Information

<p>Sichuan Borui Huaxin Technology Co., Ltd. (CNBHC) is committed to providing ultra-precision motion control core subsystems for ultra-precision machine tools, free-form mask direct writing, lithography direct writing, wafer dicing, wafer defect inspection, ultrafast wafer microscopy, micro-nano manufacturing, high-precision packaging testing, metrology, and other fields. CNBHC adheres to international standards such as GB17421, ISO230-2, and VDI3441, striving to deliver continuous, stable, and high-quality products and services. The company upholds the mission of 'Pursue Excellent Quality, Create National Brand', insisting on basic research and inheriting the spirit of craftsmanship to advance the honor of Chinese manufacturing.</p>

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REI130SL/SLE Sub-Micron Linear Positioning Stage
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