REI115SL/SLE Sub-Micron Linear Positioning Stage
The REI115SL/SLE sub-micron linear positioning stage combines the outstanding micro-displacement motion characteristics of crossed-roller guideways with ground screws, delivering excellent motion performance. With a 115 mm load carriage and standard travels of 50/100/150 mm, it is driven by C3/C1 precision ground ball screws with direct position feedback and full closed-loop control. The moving carriage features a versatile standard customer mounting interface and can be mounted on optical platforms or used for Z-axis drive; brushless slotless servo motors (with or without brakes) or stepper motors are optional, facilitating multi-axis configurations.
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Overview
Specifications
| Parameter | Value |
|---|---|
| 行程 | 50 / 100 / 150 mm |
| 导程 | 2mm |
| 直线度 | 1.5μm |
| 平面度 | 2.5μm |
| 横滚角误差 | 8 arc secarc sec |
| 偏航角误差 | 6 arc secarc sec |
| 最大速度 | 100mm/s |
| 检测溯源性 | ISO230-2 or GB17421, 5 round trips, ≥10Plot/L |
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