Nanopositioning Stage
The REI130LM is a nanopositioning stage using non-contact direct drive technology, offering a maximum acceleration of 1 g and a maximum speed of 350 mm/s with no load, and millisecond-level fast settling performance that is clearly superior to similar stages driven by precision ball screws. It provides nanometer-level precise positioning over the full travel of up to 160 mm, with minimum incremental motion better than 2 nm and positioning capability (steady-state error) of ≤1 nm. The stage can be combined with other stage products to form multi-axis systems; XY combined applications can be provided with value-added services such as orthogonality error correction and linear error compensation. Directly driven by a linear motor with a non-contact linear encoder, it features long service life and a long-term maintenance-free design.
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