Z-Axis Nanopositioning Stage
The REI95Z and REI95Z-Plus single-counterbalanced Z-axis nanopositioning stages are the best combination of speed, accuracy, system resolution, bi-directional repeatability, reliability and compact size. As derivatives of the REI series, they deliver the same motion performance as the REI95LM series and are the best Z-axis choice for space-constrained applications. ■ Excellent counterbalance mechanism The REI95Z nanopositioning stage uses a nearly frictionless balancing mechanism that maintains high performance while minimizing motor heating. The counterbalance capacity is user-adjustable from 0 to 7 kg. ■ Non-contact direct drive The application of non-contact direct drive technology gives precision micro-machining and precision measurement equipment reliable, stable, accurate and fast positioning capability, making large-scale production possible. The REI95Z series micro nanopositioning stage is one of the representative products in which advanced direct drive technology achieves nanometer-level positioning performance. Non-contact direct drive technology features high dynamic performance, zero cogging, sub-nanometer resolution, extremely low velocity ripple, high speed and high accuracy. The unique structural design and compact size allow high performance even in tight installation spaces. It is particularly suitable for applications requiring smooth, fast positioning and precise motion, such as fiber coupling manufacturing, sensor testing and scanning, and microscopy. ■ Flexible system design REI series products feature a standardized universal mounting pattern for easy system integration. 2-axis, 3-axis or more-axis applications can be flexibly assembled and configured using standard mounting holes. The flexible design greatly facilitates multi-axis configuration and applications. ■ System characteristics Extremely high system resolution is the foundation of outstanding accuracy, bi-directional repeatability and position stability. The REI95Z Z-axis nanopositioning stage achieves minimum incremental motion of better than 2 nm in linear motor applications. Being completely backlash-free with near-zero system hysteresis, this series enables precise, highly repeatable nanometer-level motion as well as extremely low-speed smooth motion (<10 nm/s).
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Specifications
| Parameter | Value |
|---|---|
| Traceability For Calibration | ISO230-2 or GB17421,往返5次,≥10Plot/L |
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