Z-Axis Positioning Stage

Z-Axis Positioning Stage

Supplier
Cnbhc
Part Number
SWI190ZS
Category
Measurement Devices
Origin
China

■ Dual-counterbalance frictionless design The SWI_ZS series dual-counterbalanced Z-axis precision direct drive stage is the best combination of speed, accuracy, system resolution, bi-directional repeatability, reliability, high rigidity and lightweight design. As a derivative of the SWI series, it delivers the same outstanding motion performance as the SWI series and is specifically designed for Z-axis applications requiring high accuracy, high rigidity and high dynamic response. The SWI_ZS series uses a frictionless dual counterbalance mechanism that maintains high performance while minimizing motor heating; the counterbalance capacity is user-adjustable from 0 to 20 kg. The dual counterbalance design minimizes the overall stage height and overturning torque while reducing the influence of straightness and angular runout on accuracy. ■ Non-contact direct drive The application of non-contact direct drive technology gives precision micro-machining and precision measurement equipment reliable, stable, accurate and fast positioning capability, making large-scale production possible. The SWI_ZS series dual-counterbalanced Z-axis precision direct drive stage is one of the representative products in which advanced direct drive technology achieves sub-micron positioning performance. Non-contact direct drive technology features high dynamic performance, zero cogging, sub-nanometer resolution, extremely low velocity ripple, high speed and high accuracy. The unique structural design and compact size allow high performance even in tight installation spaces. ■ System characteristics Extremely high system resolution is the foundation of outstanding accuracy, bi-directional repeatability and position stability. The SWI_ZS series achieves minimum incremental motion of better than 30 nm in linear-motor Z-axis applications. Being completely backlash-free with near-zero system hysteresis, the series enables precise, highly repeatable sub-micron motion. ■ Flexible, rapid system integration The SWI_ZS series dual-counterbalanced Z-axis precision direct drive stage features a standardized mounting pattern for easy system integration. 2-axis, 3-axis or more-axis applications can be flexibly assembled and configured using standard mounting holes. The flexible design greatly facilitates multi-axis configuration and applications.

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Overview

■ Dual-counterbalance frictionless design The SWI_ZS series dual-counterbalanced Z-axis precision direct drive stage is the best combination of speed, accuracy, system resolution, bi-directional repeatability, reliability, high rigidity and lightweight design. As a derivative of the SWI series, it delivers the same outstanding motion performance as the SWI series and is specifically designed for Z-axis applications requiring high accuracy, high rigidity and high dynamic response. The SWI_ZS series uses a frictionless dual counterbalance mechanism that maintains high performance while minimizing motor heating; the counterbalance capacity is user-adjustable from 0 to 20 kg. The dual counterbalance design minimizes the overall stage height and overturning torque while reducing the influence of straightness and angular runout on accuracy. ■ Non-contact direct drive The application of non-contact direct drive technology gives precision micro-machining and precision measurement equipment reliable, stable, accurate and fast positioning capability, making large-scale production possible. The SWI_ZS series dual-counterbalanced Z-axis precision direct drive stage is one of the representative products in which advanced direct drive technology achieves sub-micron positioning performance. Non-contact direct drive technology features high dynamic performance, zero cogging, sub-nanometer resolution, extremely low velocity ripple, high speed and high accuracy. The unique structural design and compact size allow high performance even in tight installation spaces. ■ System characteristics Extremely high system resolution is the foundation of outstanding accuracy, bi-directional repeatability and position stability. The SWI_ZS series achieves minimum incremental motion of better than 30 nm in linear-motor Z-axis applications. Being completely backlash-free with near-zero system hysteresis, the series enables precise, highly repeatable sub-micron motion. ■ Flexible, rapid system integration The SWI_ZS series dual-counterbalanced Z-axis precision direct drive stage features a standardized mounting pattern for easy system integration. 2-axis, 3-axis or more-axis applications can be flexibly assembled and configured using standard mounting holes. The flexible design greatly facilitates multi-axis configuration and applications.

Key Features

Frictionless dual-counterbalance design, user-adjustable from 0 to 20 kg; bi-directional repeatability up to better than 150 nm, positioning accuracy <300 nm after linear error compensation; high-rigidity lightweight structure design verified by finite element analysis; integrated side-sealing structure with low-cost, high-performance ultra-precision direct drive technology; standard modular design for flexible single-axis/multi-axis solutions

Datasheet

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Supplier Information

<p>Sichuan Borui Huaxin Technology Co., Ltd. (CNBHC) is committed to providing ultra-precision motion control core subsystems for ultra-precision machine tools, free-form mask direct writing, lithography direct writing, wafer dicing, wafer defect inspection, ultrafast wafer microscopy, micro-nano manufacturing, high-precision packaging testing, metrology, and other fields. CNBHC adheres to international standards such as GB17421, ISO230-2, and VDI3441, striving to deliver continuous, stable, and high-quality products and services. The company upholds the mission of 'Pursue Excellent Quality, Create National Brand', insisting on basic research and inheriting the spirit of craftsmanship to advance the honor of Chinese manufacturing.</p>

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