Z-Axis Positioning Stage
The SWI-SV series high-precision vertical lift stages achieve long-travel, precise vertical motion at the lowest possible profile height. Four different models offer different travel and load capacities, and each model has multiple configurations, making the SWI-SV series the ideal choice for all high-performance vertical motion applications. The SWI_SV series vertical lift stages use SP-grade crossed-roller guideways and precision ground ball screws, providing excellent geometric performance and outstanding minimum incremental motion, with minimum incremental step and positioning stability better than 30 nm. The high-precision 5-phase stepper motor with a specified preloaded precision ground screw drive, combined with a directly coupled feedback system, completely avoids the position jitter errors caused by the PID closed-loop control of conventional AC/DC servo drives; thanks to its pulse-command-type 5-phase stepper motor, the stage remains almost perfectly stationary after fast positioning. The SWI-SV uses a mechanism that directly drives the moving carriage, achieving long travel while maintaining minimum height; the design that minimizes working point height further reduces Abbe error and helps improve overall system accuracy. The SWI-SV series can be seamlessly integrated into multi-axis motion platforms, motion systems and equipment. It can be mounted directly on the SWI-SL and SWI-LM series stages developed by BHC, and is available with optional work surfaces on which various rotary tables or other process equipment can be integrated for rapid system setup and development.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel | 25mm |
| Screw Lead | 2mm |
| Accuracy | <1μm (Base, Factory) |
| Accuracy | <0.75μm (Plus, Factory) |
| Min. Incremental Motion | 100 nm (Base) |
| Min. Incremental Motion | 50 nm (Plus) |
| Bi-Directional Repeatability | <0.75μm (Base) |
| Bi-Directional Repeatability | <0.5μm (Plus) |
| Straightness | 1.5μm |
| Flatness | 2.5μm |
| Roll | 8 arc secarc sec |
| Yaw | 6 arc secarc sec |
| Maximum Speed | 15 mm/s |
| Load Capacity | 10kg (Vertical) |
| Moving Mass | 0.87 kg (-TTN) |
| Moving Mass | 1.52 kg (-TT1) |
| Stage Mass | 2.5 kg (-TTN) |
| Stage Mass | 3.2 kg (-TT1) |
| Traceability For Calibration | ISO230-2 or GB17421,往返5次,≥10Plot/L |
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