Z-Axis Vertical Lift Stage
The REI_V series nano vertical lift stage is a standardized, modular, wedge-type high-precision vertical lift platform. Driven by coreless linear motors with precision crossed-roller guidance, it combines speed, accuracy, system resolution, bi-directional repeatability, reliability and compact size. As a derivative of the REI series, it delivers the same motion performance as the REI_LM series and is the ideal Z-axis choice for space-constrained applications. The non-contact direct drive offers high dynamic performance, zero cogging, sub-nanometer resolution, extremely low velocity ripple, high speed and high accuracy; the stage features zero backlash and near-zero system hysteresis, enabling precise, highly repeatable nanometer-level motion as well as extremely low-speed smooth motion.
Save to Favorites
Overview
Specifications
| Parameter | Value |
|---|---|
| Travel | 5mm |
| Accuracy (EC) | <350nm |
| Accuracy (Base) | <250nm |
| Accuracy (Plus) | <200nm |
| Resolution (EC) | 1Vpp Sin/Cos(20um/16384)=1.2nm |
| Resolution (Base) | 1Vpp Sin/Cos(20um/65536)=0.3nm |
| Resolution (Plus) | 1Vpp Sin/Cos(20um/65536)=0.3nm |
| Min. Incremental Motion (EC) | 10nm |
| Min. Incremental Motion (Base) | 3nm |
| Min. Incremental Motion (Plus) | 2nm |
| Bi-Directional Repeatability (EC) | <250nm |
| Bi-Directional Repeatability (Base) | <250nm |
| Bi-Directional Repeatability (Plus) | <175nm |
| Straightness | <1.5um |
| Flatness | <2.5um |
| Roll | 8 arc secarc sec |
| Yaw | 5 arc secarc sec |
| Maximum Speed (Upper Axis) | 100mm/s |
| Maximum Acceleration (No Load) | 0.8g |
| Maximum Force (Continuous) | 97N |
| Load Capacity (Vertical) | 3kg |
| Moving Mass | 1kg |
| Stage Mass | 2.95kg |
Key Features
Datasheet
Supplier Information
Related Products
-
Linear Positioning Stage
Motorized Platform
Cnbhc
The SWI165LM Ite IV series sub-micron precision direct drive stage is the latest generation of sub-micron direct drive stages refined through continuous optimization. It delivers high accuracy and high dynamic performance, achieving nanometer-level minimum incremental motion and sub-micron bi-directional repeatability. Driven by a high-efficiency coreless linear motor, the stage features zero-clearance transmission, zero cogging, smooth motion and outstanding dynamic response. The stage uses a long-life precision linear guideway bearing system combined with a specially designed low-friction side-sealing structure, with an optional positive-pressure air purge system. Design travels range from 50 mm to 600 mm, with speeds up to 2000 mm/s, and a complete single-axis/multi-axis cable management solution is available. Cleanroom, vacuum and low-temperature versions can be provided through special treatment.
-
Linear Positioning Stage
Motorized Platform
Cnbhc
-
Large Optical Mounts and Precision Motion Stages
Motorized Platform
Ccyj-optics
Large Optical Mounts and Precision Motion Stages_Changchun Yingjie Optoelectronic Technology Co., Ltd. Large Optical Mounts and Precision Motion Stages - Changchun Yingjie Optoelectronic Technology Co., Ltd. - Large optical mounts include: five-axis interferometer adjustment stages, five-axis lens adjustment stages, large 300mm-600mm aperture five-axis and two-axis mounts, large-aperture (1300mm) mirror mounts, etc. (manual/electric). Customized single-axis and multi-axis motion stages (including vacuum stages) with micron-level positioning accuracy, Cartesian gantry multi-axis motion systems, and open 1-12 axis multi-axis coordinated motion control systems are available according to user requirements. Large Optical Mounts and Precision Motion Stages_Changchun Yingjie Optoelectronic Technology Co., Ltd. Home Company Profile Products Technical Strength News Online Message Contact Us Join Us Home Company Profile Products Technical Strength News Online Message Contact Us Join Us Large Optical Mounts and Precision Motion Stages Large optical mounts include: five-axis interferometer adjustment stages, five-axis lens adjustment stages, large 300mm-600mm aperture five-axis and two-axis mounts, large-aperture (1300mm) mirror mounts, etc. (manual/electric). Customized single-axis and multi-axis motion stages (including vacuum stages) with micron-level positioning accuracy, Cartesian gantry multi-axis motion systems, and open 1-12 axis multi-axis coordinated motion control systems are available according to user requirements. Product Description Parameters Application: Used for supporting and adjusting the posture and position of the interferometer main unit and large-aperture optical elements in optical testing of large-aperture components. Precision motion stages are used in precision positioning, precision measurement scanning, lithography, wafer inspection, CCD imaging and 3D imaging fields. Keywords: Motion Large-Aperture Optical Precision Five-Axis Interferometer Testing Elements Imaging Scan QR code to view on mobile Parameters Previous Large-Aperture Laser Interferometer Next Optical Lens Assembly and Testing System Address: Building 12, Science and Technology Park, Beihu Science and Technology Development Zone, Changchun City, Jilin Province Tel: 18686694097 Email: info@ccyj-opticstech.com Website: http://www.ccyj-opticstech.com/ Tel: XXXXXXXXXXX Email: design@cedemo.cn Copyright: Changchun Yingjie Optoelectronic Technology Co., Ltd. Jilin ICP ***** Technical support: Zhongqi Dongli Changchun Quick Navigation Home | Company Profile | Products | Technical Strength | News | Online Message | Contact Us | Join Us Contact Us Address: Building 12, Science and Technology Park, Beihu Science and Technology Development Zone, Changchun City, Jilin Province Tel: 18686694097 Email: info@ccyj-opticstech.com Website: http://www.ccyj-opticstech.com/ Scan and follow us Copyright: Changchun Yingjie Optoelectronic Technology Co., Ltd. Jilin ICP ***** Technical support: Zhongqi Dongli Changchun
-
MOOG J814 Servo
Motorized Platform
Thermo-test
MOOG J814 is a single-stage nozzle gas-driven server valve introduced by MoOG;
Related Articles
As a professional manufacturer of precision optical thin-film components, sycco-optics (Shandong Yanggu Hengjing Optoelectronics) launches high-performance 850nm narrow band pass filters for near-infrared precision detection, intelligent sensing and optical imaging systems. Adopting advanced vacuum coating technology, the filter realizes high transmittance in the target band and deep blocking in interference bands. It effectively eliminates stray light and spectral noise, serving as a core optical component for machine vision, biochemical detection and photoelectric sensing equipment.
Wuhan Optics Valley Quantum Technology Co., Ltd. is a leading domestic developer of high‑speed semiconductor optical chips and photodetector components. Our product portfolio covers InGaAs avalanche photodiode bare dies and PIN photodetector chips designed for fiber‑optic communication
A microlens array (MLA) is a high-precision optical component composed of hundreds or thousands of tiny, uniformly arranged micro lenses on a single flat substrate. Unlike traditional single lenses that focus one light beam, a microlens array can split, homogenize, and reshape light on a micro scale. It is widely paired with VCSELs, lasers, and image sensors, becoming a core part of modern miniature optical systems.
Shandong Huaguang Optoelectronics Co., Ltd. (HAUCORE) is a leading high-tech manufacturer of compound semiconductor optoelectronic devices, founded in 1999 and headquartered in Jinan, China, with two R&D and production bases in Jinan and Weifang.
Loading...
Name
Phone
Organization
Use Case
Database Platform