Z-Axis Vertical Lift Stage
The REI_V series nano vertical lift stage is a standardized, modular, wedge-type high-precision vertical lift platform. Driven by coreless linear motors with precision crossed-roller guidance, it combines speed, accuracy, system resolution, bi-directional repeatability, reliability and compact size. As a derivative of the REI series, it delivers the same motion performance as the REI_LM series and is the ideal Z-axis choice for space-constrained applications. The non-contact direct drive offers high dynamic performance, zero cogging, sub-nanometer resolution, extremely low velocity ripple, high speed and high accuracy; the stage features zero backlash and near-zero system hysteresis, enabling precise, highly repeatable nanometer-level motion as well as extremely low-speed smooth motion.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel | 5mm |
| Accuracy (EC) | <350nm |
| Accuracy (Base) | <250nm |
| Accuracy (Plus) | <200nm |
| Resolution (EC) | 1Vpp Sin/Cos(20um/16384)=1.2nm |
| Resolution (Base) | 1Vpp Sin/Cos(20um/65536)=0.3nm |
| Resolution (Plus) | 1Vpp Sin/Cos(20um/65536)=0.3nm |
| Min. Incremental Motion (EC) | 10nm |
| Min. Incremental Motion (Base) | 3nm |
| Min. Incremental Motion (Plus) | 2nm |
| Bi-Directional Repeatability (EC) | <250nm |
| Bi-Directional Repeatability (Base) | <250nm |
| Bi-Directional Repeatability (Plus) | <175nm |
| Straightness | <1.5um |
| Flatness | <2.5um |
| Roll | 8 arc secarc sec |
| Yaw | 5 arc secarc sec |
| Maximum Speed (Upper Axis) | 100mm/s |
| Maximum Acceleration (No Load) | 0.8g |
| Maximum Force (Continuous) | 97N |
| Load Capacity (Vertical) | 3kg |
| Moving Mass | 1kg |
| Stage Mass | 2.95kg |
Key Features
Datasheet
Supplier Information
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