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Planar DL-XY Hollow Precision Direct Drive Stage
Light-Emitting Diodes (LEDs)

Planar DL-XY Hollow Precision Direct Drive Stage

Supplier
Cnbhc
Part Number
Planar DL-XY
Category
Light-Emitting Diodes (LEDs)
Origin
China

The Planar DL-XY is an integrated one-piece XY sub-micron precision direct drive stage that provides a large clear aperture within a compact, low-profile geometry while delivering high dynamic response. The series is available in multiple sizes and accuracy grades, achieving bi-directional repeatability of better than <150 nm (ISO230-2) at best. Each axis is configured with two synchronized motors and features a high servo control bandwidth; the non-contact dual-sided synchronized drive eliminates mechanical distortion caused by the large clear aperture design. It is equipped with a cable management system specially designed for long service life and optimized performance, with additional routing available for vacuum lines.

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Overview

The Planar DL-XY is an integrated one-piece XY sub-micron precision direct drive stage that provides a large clear aperture within a compact, low-profile geometry while delivering high dynamic response. The series is available in multiple sizes and accuracy grades, achieving bi-directional repeatability of better than <150 nm (ISO230-2) at best. Each axis is configured with two synchronized motors and features a high servo control bandwidth; the non-contact dual-sided synchronized drive eliminates mechanical distortion caused by the large clear aperture design. It is equipped with a cable management system specially designed for long service life and optimized performance, with additional routing available for vacuum lines.

Applications

Double-sided LED wafer defect inspection; quasi-static optical metrology inspection under high dynamic performance; applications requiring extremely high motion straightness and flatness.

Key Features

Low-profile, integrated one-piece design with large clear aperture; control resolution ≤1.2 nm, bi-directional repeatability up to ≤200 nm; motion straightness <±0.5 μm, spatial motion flatness <±1.25 μm; positioning capability better than ±15 nm, reaching ±20 nm steady-state error within 25 ms; position following error <±50 nm during constant-velocity scanning; non-contact direct drive with zero cogging, nanometer-level resolution and extremely low velocity ripple; integrated cable management with support for vacuum line routing.

Datasheet

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Supplier Information

Cn
Cnbhc
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Sichuan CNBHC Technology Co., Ltd. (CNBHC) has long been dedicated to providing ultra-precision motion control core subsystems for fields such as ultra-precision machine tools, free-form surface mask direct writing, lithography direct writing, wafer dicing, wafer defect inspection, ultrafast wafer microscopic imaging, micro-nano manufacturing, high-precision packaging and testing, and metrology and inspection. With extreme performance that distinguishes it from competitors, CNBHC continues to provide core components and system solutions for the advanced equipment industry. CNBHC always adheres to international general testing standards such as GB17421, ISO230-2, and VDI3441, striving to provide customers with continuous, stable, and high-quality products and services. CNBHC always upholds the responsibility of "pursuing excellent quality and creating a national brand", insists on basic research, inherits the spirit of craftsmanship, and forges ahead for the honor of Made in China.

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