Planar DL-XY Hollow Precision Direct Drive Stage
The Planar DL-XY is an integrated one-piece XY sub-micron precision direct drive stage that provides a large clear aperture within a compact, low-profile geometry while delivering high dynamic response. The series is available in multiple sizes and accuracy grades, achieving bi-directional repeatability of better than <150 nm (ISO230-2) at best. Each axis is configured with two synchronized motors and features a high servo control bandwidth; the non-contact dual-sided synchronized drive eliminates mechanical distortion caused by the large clear aperture design. It is equipped with a cable management system specially designed for long service life and optimized performance, with additional routing available for vacuum lines.
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