Filmetrics R54 Series

Filmetrics R54 Series

Supplier
Ybsemi-Solution
Part Number
Filmetrics R54 Series
Category
Other
Origin
China

Filmetrics R54 Series is an advanced sheet resistance measurement system designed for precise and efficient analysis of thin films and conductive layers. It supports both 4-point probe (4PP) and non-contact eddy current (EC) methods, offering high accuracy and versatility for various applications.

Specification Snapshot
Coil Diameter
1.5mm
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Overview

Filmetrics R54 Series is an advanced sheet resistance measurement system designed for precise and efficient analysis of thin films and conductive layers. It supports both 4-point probe (4PP) and non-contact eddy current (EC) methods, offering high accuracy and versatility for various applications.

Specifications

ParameterValue
Maximum Sample Height15mm
Maximum Sample Stage Load2.5kg
Resistivity1mΩ/sq-200mΩ/sq (4PP), 1mΩ/sq-50mΩ/sq (EC)
Accuracy<0.2% (4PP), <1% (EC)
Repeatability<0.02% (4PP), <0.2% (EC)
XY Stage Travel Range200mm×200mm (R54-200), 300mm×300mm (R54-300)
Maximum Sample Diameter200mm (R54-200), 300mm (R54-300)
Machine Dimensions472mm×561mm×392mm
Machine Weight27.3kg
Probe Spacing1.016mm
Coil Frequency10MHz (EC A), 5MHz (EC B)
Coil Diameter1.5mm

Applications

1. Automotive industry 2. Solar energy 3. LED manufacturing 4. Semiconductor processing 5. Circuit board analysis 6. Flat panel display production 7. Academic research

Key Features

1. Supports both 4PP and EC measurement methods 2. High accuracy and repeatability 3. Compatible with all KLA sheet resistance probes 4. Easy-to-use software interface 5. Compact design for sensitive samples 6. Supports large samples up to 300mm diameter

Datasheet

Product Datasheet
PDF
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Supplier Information

Yb
Ybsemi-Solution
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<p>Yingbo Scientific Instruments (Shanghai) Co., Ltd. is an enterprise focused on providing comprehensive solutions for semiconductor wafer-level testing systems, micro-nano science and other fields. It mainly provides advanced semiconductor testing systems and micro-nano scientific instruments and equipment to universities, scientific research institutes and enterprises and institutions, and is committed to bringing scientific research products with market prospects to the market.</p><p><br></p><p><br></p><p> &nbsp; &nbsp; &nbsp; At present, the company has become one of the few domestic companies that provides professional scientific instruments such as semiconductor wafer-level testing systems and micro-nano processing. In the fields of semiconductor wafer-level testing system solutions, micro-nano processing equipment, micro-nano characterization equipment, micro-nano field consumables, micro-nano processing and testing, micro-nano peripheral products and other related fields, the company has an experienced and highly skilled team that can excellently complete all-round services before, during and after sales. The company is headquartered in Shanghai, and has offices in Beijing and Shenzhen. It has established 8 after-sales service outlets in Wuhan, Xi'an, Chengdu, Hefei, Shenyang, Nanjing, Xiamen, Xuzhou and other places. The outlets across the country provide customers with a large number of high-quality equipment and after-sales services, and have won a good reputation and reputation in the semiconductor technology service industry.</p><p><br></p><p> &nbsp; &nbsp; &nbsp; The company adheres to the value concepts of innovation, integrity, professionalism and efficiency, and provides high-quality equipment and technical services to partners. In the future, the company will continue to recommend the introduction of innovative and efficient product instruments and contribute a small amount to the development of the motherland's semiconductor science industry!</p>

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