Filmetrics R54 Series
Filmetrics R54 Series is an advanced sheet resistance measurement system designed for precise and efficient analysis of thin films and conductive layers. It supports both 4-point probe (4PP) and non-contact eddy current (EC) methods, offering high accuracy and versatility for various applications.
Specification Snapshot
Coil Diameter
1.5mm
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Overview
Filmetrics R54 Series is an advanced sheet resistance measurement system designed for precise and efficient analysis of thin films and conductive layers. It supports both 4-point probe (4PP) and non-contact eddy current (EC) methods, offering high accuracy and versatility for various applications.
Specifications
| Parameter | Value |
|---|---|
| Maximum Sample Height | 15mm |
| Maximum Sample Stage Load | 2.5kg |
| Resistivity | 1mΩ/sq-200mΩ/sq (4PP), 1mΩ/sq-50mΩ/sq (EC) |
| Accuracy | <0.2% (4PP), <1% (EC) |
| Repeatability | <0.02% (4PP), <0.2% (EC) |
| XY Stage Travel Range | 200mm×200mm (R54-200), 300mm×300mm (R54-300) |
| Maximum Sample Diameter | 200mm (R54-200), 300mm (R54-300) |
| Machine Dimensions | 472mm×561mm×392mm |
| Machine Weight | 27.3kg |
| Probe Spacing | 1.016mm |
| Coil Frequency | 10MHz (EC A), 5MHz (EC B) |
| Coil Diameter | 1.5mm |
Applications
1. Automotive industry 2. Solar energy 3. LED manufacturing 4. Semiconductor processing 5. Circuit board analysis 6. Flat panel display production 7. Academic research
Key Features
1. Supports both 4PP and EC measurement methods 2. High accuracy and repeatability 3. Compatible with all KLA sheet resistance probes 4. Easy-to-use software interface 5. Compact design for sensitive samples 6. Supports large samples up to 300mm diameter
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Yingbo Scientific Instruments (Shanghai) Co., Ltd. is an enterprise focused on providing comprehensive solutions for semiconductor wafer-level testing systems, micro-nano science and other fields. It mainly provides advanced semiconductor testing systems and micro-nano scientific instruments and equipment to universities, scientific research institutes and enterprises and institutions, and is committed to bringing scientific research products with market prospects to the market.</p><p><br></p><p><br></p><p> At present, the company has become one of the few domestic companies that provides professional scientific instruments such as semiconductor wafer-level testing systems and micro-nano processing. In the fields of semiconductor wafer-level testing system solutions, micro-nano processing equipment, micro-nano characterization equipment, micro-nano field consumables, micro-nano processing and testing, micro-nano peripheral products and other related fields, the company has an experienced and highly skilled team that can excellently complete all-round services before, during and after sales. The company is headquartered in Shanghai, and has offices in Beijing and Shenzhen. It has established 8 after-sales service outlets in Wuhan, Xi'an, Chengdu, Hefei, Shenyang, Nanjing, Xiamen, Xuzhou and other places. The outlets across the country provide customers with a large number of high-quality equipment and after-sales services, and have won a good reputation and reputation in the semiconductor technology service industry.</p><p><br></p><p> The company adheres to the value concepts of innovation, integrity, professionalism and efficiency, and provides high-quality equipment and technical services to partners. In the future, the company will continue to recommend the introduction of innovative and efficient product instruments and contribute a small amount to the development of the motherland's semiconductor science industry!</p>
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