Turbo Molecular Pump

Turbo Molecular Pump

Supplier
OsakaVacuum
Part Number
Turbo Molecular Pump
Category
Material-based Production Equipment
Origin
Japan

The Turbo Molecular Pump is a high-performance vacuum pump designed for applications requiring ultra-high vacuum conditions. It is engineered for precision and reliability, making it ideal for advanced scientific and industrial uses.

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Overview

The Turbo Molecular Pump is a high-performance vacuum pump designed for applications requiring ultra-high vacuum conditions. It is engineered for precision and reliability, making it ideal for advanced scientific and industrial uses.

Specifications

ParameterValue
Rotation SpeedUp to 90,000rpm
Pumping Speed50-3,000L/s
Ultimate Pressure10^-10Pa
Power ConsumptionVaries by model
Flange SizeISO
Flange SizeCF
Flange Sizeand custom options
Cooling MethodAir-cooled or water-cooled
WeightVaries by model
Vibration LevelLow
Noise Level<50dB
Control InterfaceRS232, RS485, or Ethernet

Applications

1. Semiconductor manufacturing 2. Surface analysis 3. Thin film deposition 4. Mass spectrometry

Key Features

1. High-speed rotation for ultra-high vacuum 2. Low vibration and noise levels 3. Multiple flange and cooling options 4. Durable and reliable design

Datasheet

Product Datasheet
PDF
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Supplier Information

Os
OsakaVacuum
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<p>Osaka Vacuum, Ltd. is a Japanese vacuum pump manufacturer founded in 1950. For over 75 years, the company has specialized in design, manufacturing, sales, and maintenance of vacuum pumps and systems. Its extensive product lineup includes magnetically levitated and ball-bearing turbo molecular pumps, dry vacuum pumps, roots pumps, oil-sealed rotary pumps, and vacuum systems, serving semiconductor, electronics, medical, aerospace, optical, and chemical industries worldwide.</p>

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