Turbo Molecular Pump
The Turbo Molecular Pump is a high-performance vacuum pump designed for applications requiring ultra-high vacuum conditions. It is engineered for precision and reliability, making it ideal for advanced scientific and industrial uses.
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Overview
The Turbo Molecular Pump is a high-performance vacuum pump designed for applications requiring ultra-high vacuum conditions. It is engineered for precision and reliability, making it ideal for advanced scientific and industrial uses.
Specifications
| Parameter | Value |
|---|---|
| Rotation Speed | Up to 90,000rpm |
| Pumping Speed | 50-3,000L/s |
| Ultimate Pressure | 10^-10Pa |
| Power Consumption | Varies by model |
| Flange Size | ISO |
| Flange Size | CF |
| Flange Size | and custom options |
| Cooling Method | Air-cooled or water-cooled |
| Weight | Varies by model |
| Vibration Level | Low |
| Noise Level | <50dB |
| Control Interface | RS232, RS485, or Ethernet |
Applications
1. Semiconductor manufacturing 2. Surface analysis 3. Thin film deposition 4. Mass spectrometry
Key Features
1. High-speed rotation for ultra-high vacuum 2. Low vibration and noise levels 3. Multiple flange and cooling options 4. Durable and reliable design
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Osaka Vacuum, Ltd. is a Japanese vacuum pump manufacturer founded in 1950. For over 75 years, the company has specialized in design, manufacturing, sales, and maintenance of vacuum pumps and systems. Its extensive product lineup includes magnetically levitated and ball-bearing turbo molecular pumps, dry vacuum pumps, roots pumps, oil-sealed rotary pumps, and vacuum systems, serving semiconductor, electronics, medical, aerospace, optical, and chemical industries worldwide.</p>
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