Sensistor ILS500 F Leak Detection Filler
The Sensistor ILS500 F is a gas filling unit with complete functionality for tool control and gas filling. This versatile unit can be combined with both hydrogen and helium leak detectors from INFICON. It performs a full test sequence, including gas injection, evacuation, connection/disconnection of tools, gross leak testing, pressure drop testing, sealing testing, and recipe management. The ILS500 F eliminates time-consuming manual filling with test gas and significantly improves the quality assurance of tests. A high-pressure model is also available.
Specification Snapshot
Dimensions (HxWxD)
295x275x330mm (12x11x13in.)
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Overview
The Sensistor ILS500 F is a gas filling unit with complete functionality for tool control and gas filling. This versatile unit can be combined with both hydrogen and helium leak detectors from INFICON. It performs a full test sequence, including gas injection, evacuation, connection/disconnection of tools, gross leak testing, pressure drop testing, sealing testing, and recipe management. The ILS500 F eliminates time-consuming manual filling with test gas and significantly improves the quality assurance of tests. A high-pressure model is also available.
Specifications
| Parameter | Value |
|---|---|
| Power Supply Voltage | Single Phase, 85-264VAC/47-63Hz |
| Current | 1.0A@100VAC/0.45A@230VAC |
| Rated Power | 120W max./33W typical average |
| Pressure | 0.35-0.7MPa (50-100psi) |
| Peak Consumption at 0.6MPa | 240l/min (508SCFH) |
| Test Gas Supply Pressure | 0.005-1.0MPa (0.72-145psi) |
| Recommended Gas Composition | 5% H2/95% N2 |
| Evacuation Capacity | 0.4sl/min to -50kPa (-7.2psi), 1.5sl/min to -80kPa (-11.6psi) |
| Max. Vacuum | ≤-85kPa (-12.3psi) |
| Filling Capacity at 1MPa Output | 0.1sl/min to 0.1MPa (14.5psi), 0.5sl/min to 0.6MPa (87psi) |
| Output Valve Cv for Tool Control | 0.16USGPM/psi |
| Flow Rate | 160std l/min |
| Valve Type | Normally closed, 3/2 valve |
| Gas and Air Connection | Female ISO 3/8in. (ISO to NPT 3/8in. adapters included) |
| Input/Output Interface | USB, RS232: male, 9 pin, D-sub, Ethernet: RJ45 (Modbus) |
| Output Capacity | max. 0.5A/output (max. 2.5A total), 24VDC logic |
| Ambient Humidity | 85%RH (non-condensing) |
| Temperature range | +10 to +40°C (+50 to +100°F) |
| Start Time | 37s |
| Dimensions (HxWxD) | 295x275x330mm (12x11x13in.) |
| Weight | 14.3kg (31.5lb) |
Applications
1. Tool control 2. Gas filling for leak detection 3. Quality assurance in testing processes 4. High-pressure applications
Key Features
1. Complete functionality for tool control and gas filling 2. User-friendly touchscreen for functional settings 3. USB port for downloads and backups 4. Gross leak testing performed before leak testing 5. High-pressure model available
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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