Sensistor ILS500 F Leak Detection Filler

Sensistor ILS500 F Leak Detection Filler

Supplier
Inficon
Part Number
Sensistor ILS500 F Leak Detection Filler
Category
Other
Origin
China

The Sensistor ILS500 F is a gas filling unit with complete functionality for tool control and gas filling. This versatile unit can be combined with both hydrogen and helium leak detectors from INFICON. It performs a full test sequence, including gas injection, evacuation, connection/disconnection of tools, gross leak testing, pressure drop testing, sealing testing, and recipe management. The ILS500 F eliminates time-consuming manual filling with test gas and significantly improves the quality assurance of tests. A high-pressure model is also available.

Specification Snapshot
Dimensions (HxWxD)
295x275x330mm (12x11x13in.)
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Overview

The Sensistor ILS500 F is a gas filling unit with complete functionality for tool control and gas filling. This versatile unit can be combined with both hydrogen and helium leak detectors from INFICON. It performs a full test sequence, including gas injection, evacuation, connection/disconnection of tools, gross leak testing, pressure drop testing, sealing testing, and recipe management. The ILS500 F eliminates time-consuming manual filling with test gas and significantly improves the quality assurance of tests. A high-pressure model is also available.

Specifications

ParameterValue
Power Supply VoltageSingle Phase, 85-264VAC/47-63Hz
Current1.0A@100VAC/0.45A@230VAC
Rated Power120W max./33W typical average
Pressure0.35-0.7MPa (50-100psi)
Peak Consumption at 0.6MPa240l/min (508SCFH)
Test Gas Supply Pressure0.005-1.0MPa (0.72-145psi)
Recommended Gas Composition5% H2/95% N2
Evacuation Capacity0.4sl/min to -50kPa (-7.2psi), 1.5sl/min to -80kPa (-11.6psi)
Max. Vacuum≤-85kPa (-12.3psi)
Filling Capacity at 1MPa Output0.1sl/min to 0.1MPa (14.5psi), 0.5sl/min to 0.6MPa (87psi)
Output Valve Cv for Tool Control0.16USGPM/psi
Flow Rate160std l/min
Valve TypeNormally closed, 3/2 valve
Gas and Air ConnectionFemale ISO 3/8in. (ISO to NPT 3/8in. adapters included)
Input/Output InterfaceUSB, RS232: male, 9 pin, D-sub, Ethernet: RJ45 (Modbus)
Output Capacitymax. 0.5A/output (max. 2.5A total), 24VDC logic
Ambient Humidity85%RH (non-condensing)
Temperature range+10 to +40°C (+50 to +100°F)
Start Time37s
Dimensions (HxWxD)295x275x330mm (12x11x13in.)
Weight14.3kg (31.5lb)

Applications

1. Tool control 2. Gas filling for leak detection 3. Quality assurance in testing processes 4. High-pressure applications

Key Features

1. Complete functionality for tool control and gas filling 2. User-friendly touchscreen for functional settings 3. USB port for downloads and backups 4. Gross leak testing performed before leak testing 5. High-pressure model available

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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