SKY® CDG200D

SKY® CDG200D

Supplier
Inficon
Part Number
SKY® CDG200D
Category
Other
Origin
China

The INFICON SKY CDG200D is a high-temperature capacitance diaphragm gauge designed for precise pressure measurement and control in demanding environments. With a sensor temperature of 200°C, it is ideal for semiconductor and coating processes.

Specification Snapshot
Resolution
percent FS 0.003
Request a Quote Download Datasheet Chat
Save to Favorites Save to Favorites

Overview

The INFICON SKY CDG200D is a high-temperature capacitance diaphragm gauge designed for precise pressure measurement and control in demanding environments. With a sensor temperature of 200°C, it is ideal for semiconductor and coating processes.

Specifications

ParameterValue
Accuracy% of reading 0.4
Temperature Effect% of reading/°C 0.02
Zeropercent FS/°C 0.005
Full Scale% of reading/°C 0.02
Pressure, MaximumkPa (absolute) 400
Resolutionpercent FS 0.003
Minimum Readingpercent FS 0.01
Recommended Minimum Readingpercent FS 0.05
Recommended Minimum Absolute Pressurepercent FS 0.5
Operating Temperature°C +10...+50
Indoor Operating Temperature°C +10...+50
Bakeout Temperature°C ≤200
IP storage°C -40...+65
Power Supply Voltage+21...+30V DC or ±15V (±5%)
Heating powerW ≤25
Operating PowerW ≤18
Output Signal (Analog)V (dc) 0...+10
Response Timems 30
Protection LevelIP 40
StandardsEN 61000-6-2-6-3, EN 61010 & RoHS
ETL CertificationUL 61010-1, CSA 22.2 No.61010-1
SEMI ComplianceSEMI S2
Electrical ConnectionD-Sub, 15-pin, male
Set Point Quantity2 (SP1, SP2)
Set PointA (dc) ≤0.5
Full Scalepercent FS 1
Diagnostic portRS232-C
Materials Exposed to VacuumAluminum oxide ceramic (Al2O3), stainless steel (AISI 316L)
Internal Volume 1/2" Tubecm³ (in³) 4.2 (0.26)
Internal Volume DN 16 ISO KFcm³ (in³) 4.2 (0.26)
Internal Volume DN 16 CF-Rcm³ (in³) 4.2 (0.26)
Internal Volume 8 VCRcm³ (in³) 4.2 (0.26)
Weight 1/2" tubeg 837
Weight DN 16 ISO KFg 852
Weight DN 16 CF-Rg 875
Weight 8 VCRg 897
EtherCAT ProtocolETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge
Node AddressExplicit Device Identification
Physical Layer100BASE-Tx (IEEE 802.3)
Digital Function Readingpressure
Digital Function Readingstatus
Digital Function ReadingID
Digital Function Settingset points
Digital Function Settingfilter
Digital Function Settingzero adjust
Digital Function Settingfactory reset
Digital Function SettingDC offset
Mailbox (CoE)SDO requests
Mailbox (CoE)responses and information
EtherCAT Connector2 x RJ45, 8-pin (socket), IN and OUT
Cableshielded Ethernet CAT5e or higher
EtherCAT cable lengthm (ft.) ≤100 (330)
EtherCAT signal processing timems 2
DeviceNet ProtocolDeviceNet™, group 2 slave only
MAC IDaddress 00-63 by switch or network programmable
Technical SpecificationsDeviceNet™ "VG" Vacuum Gauge Profile (ODVA)
I/O Slave Communicationpolling only
Power Supply Voltage for Vacuum Type D Connector+14...+30V DC or ±15V V (dc) ≤12W
Voltage for DeviceNet Transceiver on Microstyle Connector24V nom/≤42W (11...25V)
DeviceNet Connectormicrostyle, 5-pin, male
CDG Connector (Analog Output, CDG Power Supply Voltage, Set Point)D-sub, 15-pin, male
DeviceNet Data RatekBaud 125, 250, 500 by switch or network programmable
DeviceNet Cable Length 125kbpsm (ft.) 500 (1650)
DeviceNet Cable Length 250kbpsm (ft.) 250 (825)
DeviceNet Cable Length 500kbpsm (ft.) 100 (330)
Profibus DP baud rateMbaud 1.5/12
Profibus DP Addressaddress 00-125 by switch or network programmable
Profibus DP ConnectorD-sub, 9-pin, female
4-20mA Current Loop (Analog) Signal RangemA 3.8...20.2
4-20mA Current Loop (Analog) Measuring Range (Zero...FS)mA 4.0...20.0
4-20mA Current Loop (Analog) Loaded Impedance RLΩ typical 500Ω±1% 24±3V (dc)
4-20mA Current Loop (Analog) Loaded Impedance AbsoluteΩ 309...657Ω±1% 24V (dc)

Applications

1. Semiconductor manufacturing 2. Coating processes 3. High-temperature applications

Key Features

1. High temperature resistance 2. Precise pressure measurement 3. Compact design 4. Low power consumption 5. Easy integration with various interfaces

Datasheet

Product Datasheet
PDF
Download

Supplier Information

In
Inficon
View Supplier →
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

Request a Quote

Our team responds within 24–48 hours
SKY® CDG200D
Inficon · Other
Direct from Manufacturer
Your inquiry will be sent directly to the manufacturer
Photonics Source Platform
We handles the inquiry on your behalf
Your information is protected and will never be shared without consent.
Contact Us

Loading...

GetExperimental Plan

Name

Phone

+86

Organization

Use Case

AI Parametric Selection
Smart Match · Precise Recs
Enter Specifications
AI Smart Matching
Get Best Matches
Skip Manual Comparison
Find Best Solutions Fast
Select Now →