SKY® CDG200D
The INFICON SKY CDG200D is a high-temperature capacitance diaphragm gauge designed for precise pressure measurement and control in demanding environments. With a sensor temperature of 200°C, it is ideal for semiconductor and coating processes.
Specification Snapshot
Resolution
percent FS 0.003
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Overview
The INFICON SKY CDG200D is a high-temperature capacitance diaphragm gauge designed for precise pressure measurement and control in demanding environments. With a sensor temperature of 200°C, it is ideal for semiconductor and coating processes.
Specifications
| Parameter | Value |
|---|---|
| Accuracy | % of reading 0.4 |
| Temperature Effect | % of reading/°C 0.02 |
| Zero | percent FS/°C 0.005 |
| Full Scale | % of reading/°C 0.02 |
| Pressure, Maximum | kPa (absolute) 400 |
| Resolution | percent FS 0.003 |
| Minimum Reading | percent FS 0.01 |
| Recommended Minimum Reading | percent FS 0.05 |
| Recommended Minimum Absolute Pressure | percent FS 0.5 |
| Operating Temperature | °C +10...+50 |
| Indoor Operating Temperature | °C +10...+50 |
| Bakeout Temperature | °C ≤200 |
| IP storage | °C -40...+65 |
| Power Supply Voltage | +21...+30V DC or ±15V (±5%) |
| Heating power | W ≤25 |
| Operating Power | W ≤18 |
| Output Signal (Analog) | V (dc) 0...+10 |
| Response Time | ms 30 |
| Protection Level | IP 40 |
| Standards | EN 61000-6-2-6-3, EN 61010 & RoHS |
| ETL Certification | UL 61010-1, CSA 22.2 No.61010-1 |
| SEMI Compliance | SEMI S2 |
| Electrical Connection | D-Sub, 15-pin, male |
| Set Point Quantity | 2 (SP1, SP2) |
| Set Point | A (dc) ≤0.5 |
| Full Scale | percent FS 1 |
| Diagnostic port | RS232-C |
| Materials Exposed to Vacuum | Aluminum oxide ceramic (Al2O3), stainless steel (AISI 316L) |
| Internal Volume 1/2" Tube | cm³ (in³) 4.2 (0.26) |
| Internal Volume DN 16 ISO KF | cm³ (in³) 4.2 (0.26) |
| Internal Volume DN 16 CF-R | cm³ (in³) 4.2 (0.26) |
| Internal Volume 8 VCR | cm³ (in³) 4.2 (0.26) |
| Weight 1/2" tube | g 837 |
| Weight DN 16 ISO KF | g 852 |
| Weight DN 16 CF-R | g 875 |
| Weight 8 VCR | g 897 |
| EtherCAT Protocol | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge |
| Node Address | Explicit Device Identification |
| Physical Layer | 100BASE-Tx (IEEE 802.3) |
| Digital Function Reading | pressure |
| Digital Function Reading | status |
| Digital Function Reading | ID |
| Digital Function Setting | set points |
| Digital Function Setting | filter |
| Digital Function Setting | zero adjust |
| Digital Function Setting | factory reset |
| Digital Function Setting | DC offset |
| Mailbox (CoE) | SDO requests |
| Mailbox (CoE) | responses and information |
| EtherCAT Connector | 2 x RJ45, 8-pin (socket), IN and OUT |
| Cable | shielded Ethernet CAT5e or higher |
| EtherCAT cable length | m (ft.) ≤100 (330) |
| EtherCAT signal processing time | ms 2 |
| DeviceNet Protocol | DeviceNet™, group 2 slave only |
| MAC ID | address 00-63 by switch or network programmable |
| Technical Specifications | DeviceNet™ "VG" Vacuum Gauge Profile (ODVA) |
| I/O Slave Communication | polling only |
| Power Supply Voltage for Vacuum Type D Connector | +14...+30V DC or ±15V V (dc) ≤12W |
| Voltage for DeviceNet Transceiver on Microstyle Connector | 24V nom/≤42W (11...25V) |
| DeviceNet Connector | microstyle, 5-pin, male |
| CDG Connector (Analog Output, CDG Power Supply Voltage, Set Point) | D-sub, 15-pin, male |
| DeviceNet Data Rate | kBaud 125, 250, 500 by switch or network programmable |
| DeviceNet Cable Length 125kbps | m (ft.) 500 (1650) |
| DeviceNet Cable Length 250kbps | m (ft.) 250 (825) |
| DeviceNet Cable Length 500kbps | m (ft.) 100 (330) |
| Profibus DP baud rate | Mbaud 1.5/12 |
| Profibus DP Address | address 00-125 by switch or network programmable |
| Profibus DP Connector | D-sub, 9-pin, female |
| 4-20mA Current Loop (Analog) Signal Range | mA 3.8...20.2 |
| 4-20mA Current Loop (Analog) Measuring Range (Zero...FS) | mA 4.0...20.0 |
| 4-20mA Current Loop (Analog) Loaded Impedance RL | Ω typical 500Ω±1% 24±3V (dc) |
| 4-20mA Current Loop (Analog) Loaded Impedance Absolute | Ω 309...657Ω±1% 24V (dc) |
Applications
1. Semiconductor manufacturing 2. Coating processes 3. High-temperature applications
Key Features
1. High temperature resistance 2. Precise pressure measurement 3. Compact design 4. Low power consumption 5. Easy integration with various interfaces
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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