SKY® CDG160D

SKY® CDG160D

Supplier
Inficon
Part Number
SKY® CDG160D
Category
Other
Origin
China

The SKY® CDG160D is a high-precision capacitance diaphragm gauge designed for accurate pressure measurement and control in high-temperature environments. With a sensor temperature of 160°C, it is ideal for demanding semiconductor and coating applications.

Specification Snapshot
Resolution
percent FS 0.003
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Overview

The SKY® CDG160D is a high-precision capacitance diaphragm gauge designed for accurate pressure measurement and control in high-temperature environments. With a sensor temperature of 160°C, it is ideal for demanding semiconductor and coating applications.

Specifications

ParameterValue
Accuracy% of reading 0.4
Temperature Effect% of reading/°C 0.02
Zero Pointpercent FS/°C 0.005
Pressure, MaxkPa (absolute) 400 (1000...500 Torr/mbar), 260 (200...1 Torr/mbar)
Resolutionpercent FS 0.003
Minimum detectable numberpercent FS 0.01
Recommended Minimum Readingpercent FS 0.05
Recommended minimum detectable pressurepercent FS 0.5
Operating temperature (ambient)°C +10...+50
Operating temperature (housing)°C +10...+50
Bakeout at flange°C ≤200
IP storage°C -40...+65
Power Supply Voltage+21...+30V DC or ±15V (±5%)
Heating powerW ≤18
Operating PowerW ≤12
Output Signal (Analog)V (dc) 0...+10
Response Timems 30
Protection ClassIP40
CE complianceEN 61000-6-2/-6-3, EN 61010 & RoHS
ETL CertificationUL 61010-1, CSA 22.2 No.61010-1
SEMI ComplianceSEMI S2
Electrical ConnectionD-Sub, 15-pin, male
Number of Set Points2 (SP1, SP2)
Relay contact currentA (dc) ≤0.5
Set point hysteresispercent FS 1
Diagnostic portRS232-C
Readoutpressure
Readoutstatus
ReadoutID
Settingsset points
Settingsfilter
Settingszero adjust
Settingsfactory reset
SettingsDC offset
Materials Exposed to VacuumAluminum oxide ceramic (Al2O3), stainless steel (AISI 316L)
Internal Volume 1/2" Tubecm³ (in.³) 4.2 (0.26)
Internal Volume DN 16 ISO KFcm³ (in.³) 4.2 (0.26)
Internal Volume DN 16 CF-Rcm³ (in.³) 4.2 (0.26)
Internal volume 8 VCR®cm³ (in.³) 4.2 (0.26)
Weight 1/2" tubeg 837
Weight DN 16 ISO KFg 852
Weight DN 16 CF-Rg 875
Weight 8 VCR®g 897
EtherCAT Protocolprotocol specialized for EtherCAT
Communication StandardETG.5003.1 S (R) V1.1.0 Common Device Profile, ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge
Node AddressExplicit Device Identification
Physical Layer100BASE-Tx (IEEE 802.3)
Digital function readoutpressure
Digital function readoutstatus
Digital function readoutID
Digital Function Settingsset points
Digital Function Settingsfilter
Digital Function Settingszero adjust
Digital Function Settingsfactory reset
Digital Function SettingsDC offset
Mailbox (CoE)SDO requests
Mailbox (CoE)responses and information
EtherCAT Connector2 x RJ45, 8-pin (socket), IN and OUT
Cableshielded Ethernet CAT5e or higher
EtherCAT cable lengthm (ft.) ≤100 (330)
EtherCAT signal processing timems 2
DeviceNet ProtocolDeviceNet™, group 2 slave only
MAC IDaddress 00-63 by switch or network programmable
Power supply voltage for microstyle connector+14...+30V DC or ±15V (±5%)
DeviceNet power supply voltage24V nom / ≤2W (11...25V)
DeviceNet electrical connectionmicrostyle, 5-pin, male
CDG (analog output, power supply, set point) connectorD-sub, 15-pin, male
DeviceNet Data RatekBaud 125, 250, 500 by switch or network programmable
Cable Length 125kbpsm (ft.) 500 (1650)
Cable Length 250kbpsm (ft.) 250 (825)
Cable Length 500kbpsm (ft.) 100 (330)
Profibus DP baud rateMbaud 1.5 / 12
Profibus DP Addressaddress 00-125 by switch or network programmable
Profibus DP ConnectorD-sub, 9-pin, female
4-20mA current loop signal range (analog)mA 3.8...20.2
4-20mA current loop measuring range (zero...FS)mA 4.0...20.0
4-20mA Current Loop Loaded Impedance RLΩ typical 500Ω ±1% 24±3V (dc)
4-20mA Current Loop Loaded Impedance AbsoluteΩ 309...657Ω at 24V (dc) (5)

Applications

1. Semiconductor manufacturing 2. Coating processes 3. High-temperature applications

Key Features

1. High accuracy with 0.4% of reading 2. High temperature operation up to 160°C 3. Compact design with integrated electronics 4. Fast warm-up time, saving energy and cost 5. Adjustable zero point for flexible calibration 6. Compliance with CE, EN, UL, SEMI, and RoHS standards

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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