SKY® CDG160D
The SKY® CDG160D is a high-precision capacitance diaphragm gauge designed for accurate pressure measurement and control in high-temperature environments. With a sensor temperature of 160°C, it is ideal for demanding semiconductor and coating applications.
Specification Snapshot
Resolution
percent FS 0.003
Request a Quote
Download Datasheet
Chat
Overview
The SKY® CDG160D is a high-precision capacitance diaphragm gauge designed for accurate pressure measurement and control in high-temperature environments. With a sensor temperature of 160°C, it is ideal for demanding semiconductor and coating applications.
Specifications
| Parameter | Value |
|---|---|
| Accuracy | % of reading 0.4 |
| Temperature Effect | % of reading/°C 0.02 |
| Zero Point | percent FS/°C 0.005 |
| Pressure, Max | kPa (absolute) 400 (1000...500 Torr/mbar), 260 (200...1 Torr/mbar) |
| Resolution | percent FS 0.003 |
| Minimum detectable number | percent FS 0.01 |
| Recommended Minimum Reading | percent FS 0.05 |
| Recommended minimum detectable pressure | percent FS 0.5 |
| Operating temperature (ambient) | °C +10...+50 |
| Operating temperature (housing) | °C +10...+50 |
| Bakeout at flange | °C ≤200 |
| IP storage | °C -40...+65 |
| Power Supply Voltage | +21...+30V DC or ±15V (±5%) |
| Heating power | W ≤18 |
| Operating Power | W ≤12 |
| Output Signal (Analog) | V (dc) 0...+10 |
| Response Time | ms 30 |
| Protection Class | IP40 |
| CE compliance | EN 61000-6-2/-6-3, EN 61010 & RoHS |
| ETL Certification | UL 61010-1, CSA 22.2 No.61010-1 |
| SEMI Compliance | SEMI S2 |
| Electrical Connection | D-Sub, 15-pin, male |
| Number of Set Points | 2 (SP1, SP2) |
| Relay contact current | A (dc) ≤0.5 |
| Set point hysteresis | percent FS 1 |
| Diagnostic port | RS232-C |
| Readout | pressure |
| Readout | status |
| Readout | ID |
| Settings | set points |
| Settings | filter |
| Settings | zero adjust |
| Settings | factory reset |
| Settings | DC offset |
| Materials Exposed to Vacuum | Aluminum oxide ceramic (Al2O3), stainless steel (AISI 316L) |
| Internal Volume 1/2" Tube | cm³ (in.³) 4.2 (0.26) |
| Internal Volume DN 16 ISO KF | cm³ (in.³) 4.2 (0.26) |
| Internal Volume DN 16 CF-R | cm³ (in.³) 4.2 (0.26) |
| Internal volume 8 VCR® | cm³ (in.³) 4.2 (0.26) |
| Weight 1/2" tube | g 837 |
| Weight DN 16 ISO KF | g 852 |
| Weight DN 16 CF-R | g 875 |
| Weight 8 VCR® | g 897 |
| EtherCAT Protocol | protocol specialized for EtherCAT |
| Communication Standard | ETG.5003.1 S (R) V1.1.0 Common Device Profile, ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge |
| Node Address | Explicit Device Identification |
| Physical Layer | 100BASE-Tx (IEEE 802.3) |
| Digital function readout | pressure |
| Digital function readout | status |
| Digital function readout | ID |
| Digital Function Settings | set points |
| Digital Function Settings | filter |
| Digital Function Settings | zero adjust |
| Digital Function Settings | factory reset |
| Digital Function Settings | DC offset |
| Mailbox (CoE) | SDO requests |
| Mailbox (CoE) | responses and information |
| EtherCAT Connector | 2 x RJ45, 8-pin (socket), IN and OUT |
| Cable | shielded Ethernet CAT5e or higher |
| EtherCAT cable length | m (ft.) ≤100 (330) |
| EtherCAT signal processing time | ms 2 |
| DeviceNet Protocol | DeviceNet™, group 2 slave only |
| MAC ID | address 00-63 by switch or network programmable |
| Power supply voltage for microstyle connector | +14...+30V DC or ±15V (±5%) |
| DeviceNet power supply voltage | 24V nom / ≤2W (11...25V) |
| DeviceNet electrical connection | microstyle, 5-pin, male |
| CDG (analog output, power supply, set point) connector | D-sub, 15-pin, male |
| DeviceNet Data Rate | kBaud 125, 250, 500 by switch or network programmable |
| Cable Length 125kbps | m (ft.) 500 (1650) |
| Cable Length 250kbps | m (ft.) 250 (825) |
| Cable Length 500kbps | m (ft.) 100 (330) |
| Profibus DP baud rate | Mbaud 1.5 / 12 |
| Profibus DP Address | address 00-125 by switch or network programmable |
| Profibus DP Connector | D-sub, 9-pin, female |
| 4-20mA current loop signal range (analog) | mA 3.8...20.2 |
| 4-20mA current loop measuring range (zero...FS) | mA 4.0...20.0 |
| 4-20mA Current Loop Loaded Impedance RL | Ω typical 500Ω ±1% 24±3V (dc) |
| 4-20mA Current Loop Loaded Impedance Absolute | Ω 309...657Ω at 24V (dc) (5) |
Applications
1. Semiconductor manufacturing 2. Coating processes 3. High-temperature applications
Key Features
1. High accuracy with 0.4% of reading 2. High temperature operation up to 160°C 3. Compact design with integrated electronics 4. Fast warm-up time, saving energy and cost 5. Adjustable zero point for flexible calibration 6. Compliance with CE, EN, UL, SEMI, and RoHS standards
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
Contact Us
Loading...
GetExperimental Plan
Name
Phone
+86
Organization
Use Case

Global Photonics Products
Database Platform
Database Platform
With 16 years of experience, we provide high-quality products and services to universities, research institutes, and industry.
50+ Detailed Categories · 3,000+ Global Brands · 100,000+ Photonics Products
1 Million+
In-depth analysis of professional academic resources in photonics
300,000
ProductsDatasheets Available Free
We will keep your personal information strictly confidential.
Product Quote
+86
* Select the quoting party:
By submitting, you agree to the User Service Agreement and Privacy Policy