SKY® CDG100D

SKY® CDG100D

Supplier
Inficon
Part Number
SKY® CDG100D
Category
Other
Origin
China

The SKY® CDG100D is a high-performance vacuum gauge designed for precise pressure measurement and control in high-temperature applications, capable of operating at up to 100°C.

Specification Snapshot
Resolution
0.003% FS
Power Consumption During Heating
≤15W
Power Consumption During Operation
≤10W
Cable Length
≤100m (330ft)
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Overview

The SKY® CDG100D is a high-performance vacuum gauge designed for precise pressure measurement and control in high-temperature applications, capable of operating at up to 100°C.

Specifications

ParameterValue
Accuracy0.2% of reading (1000-500 Torr/mbar), 0.2% of reading (200-1 Torr/mbar), 0.4% of reading (0.5-0.1 Torr/mbar)
Temperature Effect0.0025% FS/°C (1000-500 Torr/mbar, 200-1 Torr/mbar), 0.005% FS/°C (0.5-0.1 Torr/mbar)
Full Scale1000 Torr/mbar, 200 Torr/mbar, 0.5 Torr/mbar
Maximum Pressure400kPa (1000-500 Torr/mbar), 260kPa (200-1 Torr/mbar), 130kPa (0.5-0.1 Torr/mbar)
Resolution0.003% FS
Minimum Reading0.01% FS
Recommended Minimum Reading0.05% FS
Recommended Control Accuracy0.5% FS
Operating Temperature+10°C to +50°C
Storage Temperature-20°C to +65°C
Power Supply Voltage+14V to +30V DC or ±15V (±5%)
Power Consumption During Heating≤15W
Power Consumption During Operation≤10W
Output Signal (Analog)0V to +10V DC
Response Time30ms (1000-500 Torr/mbar, 200-1 Torr/mbar), 130ms (0.5-0.1 Torr/mbar)
Protection LevelIP40
Electrical ConnectionD-sub, 15-pin, male
Number of Set Points2 (SP1, SP2)
Set Point Voltage≤30V DC
Relay Contact Current≤0.5A DC
Relay Contact Voltage≤30V DC
Diagnostic Port ProtocolRS232-C
Materials Exposed to VacuumAluminum oxide ceramic (Al2O3), stainless steel (AISI 316L)
Internal Volume 1/2" Tube4.2cm³ (0.26in³)
Internal Volume DN16 ISO KF4.2cm³ (0.26in³)
Internal Volume DN16 CF-R4.2cm³ (0.26in³)
Internal Volume 8 VCR4.2cm³ (0.26in³)
Weight 1/2" Tube837g
Weight DN16 ISO KF852g
Weight DN16 CF-R875g
Weight 8 VCR897g
EtherCAT ProtocolETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge
Node AddressExplicit Device Identification
Physical Layer100BASE-Tx (IEEE 802.3)
Signal Processing Time2ms
Profinet Communication ProtocolProtocol specialized for Profinet
Profinet Connector2 x RJ45, 8-pin (socket), input & output
Profinet CableSpecial Ethernet Patch Cable or Crossover Cable, shielded (CAT5e quality or higher)
Cable Length≤100m (330ft)
DeviceNet ProtocolDeviceNet™, group 2 slave only
MAC IDAddress 00-63 by switch or network programmable
Data Rate125, 250, 500kbps by switch or network programmable
Profibus DP Baud Rate9.6/19.2/93.75/187.5/500kBaud
Profibus DP AddressAddress 00-125 by switch or network programmable
Profibus DP ConnectorD-sub, 9-pin, female
4-20mA Current Loop Signal Range3.8mA to 20.2mA
4-20mA Current Loop Measuring Range4.0mA to 20.0mA
4-20mA Current Loop Loaded Impedance RLTypical 500Ω ±1%
4-20mA Current Loop Loaded Impedance Absolute309Ω-657Ω at 24V DC

Applications

1. Semiconductor manufacturing 2. Vacuum systems 3. High-temperature processes

Key Features

1. High accuracy and stability 2. Compact design with fast warm-up 3. Low power consumption 4. Wide compatibility with various communication protocols

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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