SKY® CDG025D-X3

SKY® CDG025D-X3

Supplier
Inficon
Part Number
SKY® CDG025D-X3
Category
Other
Origin
China

The SKY® CDG025D-X3 is a high-precision capacitance diaphragm vacuum gauge designed for applications requiring accurate pressure measurement in vacuum systems. It features advanced EMC protection, long-term signal stability, and robust construction for reliable operation in demanding environments.

Specification Snapshot
Resolution
0.003% FS
Response Time
≤100ms
Dimensions
116mm x 55mm (height x diameter)
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Overview

The SKY® CDG025D-X3 is a high-precision capacitance diaphragm vacuum gauge designed for applications requiring accurate pressure measurement in vacuum systems. It features advanced EMC protection, long-term signal stability, and robust construction for reliable operation in demanding environments.

Specifications

ParameterValue
Accuracy0.2% of reading (1000 Torr/1100 mbar, 500-10 Torr/mbar, 1 Torr/mbar), 0.25% of reading (0.25 Torr/mbar), 0.5% of reading (0.1 Torr/mbar)
Temperature Effect0.005% FS/°C (1000 Torr/1100 mbar, 500-10 Torr/mbar, 1 Torr/mbar), 0.015% FS/°C (0.25 Torr/mbar), 0.02% FS/°C (0.1 Torr/mbar)
Zero0.005% FS/°C (1000 Torr/1100 mbar, 500-10 Torr/mbar), 0.015% FS/°C (0.25 Torr/mbar), 0.02% FS/°C (0.1 Torr/mbar)
Full Scale0.01% FS/°C (1000 Torr/1100 mbar, 500-10 Torr/mbar, 1 Torr/mbar), 0.03% FS/°C (0.25 Torr/mbar, 0.1 Torr/mbar)
Resolution0.003% FS
Maximum Pressure300kPa (1000 Torr/1100 mbar), 200kPa (500-10 Torr/mbar, 1 Torr/mbar), 130kPa (0.25 Torr/mbar, 0.1 Torr/mbar)
Response Time≤100ms
Minimum Low Pressure0.01% FS (1000 Torr/1100 mbar, 500-10 Torr/mbar, 1 Torr/mbar), 0.03% FS (0.25 Torr/mbar, 0.1 Torr/mbar)
Operating Environment+5°C to +60°C
Storage Environment-20°C to +65°C
Power Supply Voltage+21V to +27V
Signal Range3.8mA to 20.2mA
Measuring Range4.0mA to 20.0mA
Electrical ConnectionD-Sub, 9-pin
Protection LevelIP30
StandardsEN 61000-6-2, EN 61000-6-3, EN 61010-1, UL 61010-1, CSA 22.2 No.61010-1, RoHS
Sensor CableTwo-wire cable plus shielding (without remote zero), Four-wire cable plus shielding (with remote zero)
Materials Exposed to VacuumAluminum oxide ceramic (Al2O3), Stainless steel (AISI 316L)
Internal Volume3.6cm³ (0.22in³)
Weight310g (1/2" tube), 330g (DN 16 ISO-KF), 350g (DN 16 CF-R), 370g (8 VCR)
Dimensions116mm x 55mm (height x diameter)

Applications

1. Semiconductor manufacturing 2. Vacuum system monitoring 3. Laboratory research 4. Industrial process control

Key Features

1. Wide pressure range from 100mTorr to 1000Torr 2. Fast electrical connection stabilization 3. Rapid recovery from atmospheric pressure 4. Excellent long-term signal stability 5. Temperature compensation 6. Overpressure protection 7. One-button zeroing function 8. Status LED

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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