PSG550, PSG552, PSG554
The INFICON Pirani Standard Gauge (PSG55x) employs advanced digital Pirani technology for vacuum pressure measurement. It features a rugged sensor design, compact size, and versatile functionality, making it suitable for applications ranging from low to high vacuum ranges.
Specification Snapshot
Power Consumption
≤2.5W (without fieldbus), ≤3W (DeviceNet), ≤3W (Profibus DP), ≤4.5W (EtherCAT)
Cable Length
<100m (<330ft)
RS232C Operation
<30m (<100ft)
Materials Exposed to Vacuum PSG550
W
Materials Exposed to Vacuum PSG550
Ni
Materials Exposed to Vacuum PSG550
NiFe
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Overview
The INFICON Pirani Standard Gauge (PSG55x) employs advanced digital Pirani technology for vacuum pressure measurement. It features a rugged sensor design, compact size, and versatile functionality, making it suitable for applications ranging from low to high vacuum ranges.
Specifications
| Parameter | Value |
|---|---|
| Measurement Range PSG550 | 5×10⁻⁵...1000mbar |
| Measurement Range PSG552 | 5×10⁻⁵...1000mbar (3.8×10⁻⁵...750Torr) |
| Measurement Range PSG554 | 5×10⁻⁵...1000mbar |
| Accuracy PSG550 | ±50% of reading (5×10⁻⁵...1×10⁻³mbar), ±15% of reading (1×10⁻³...100mbar), ±50% of reading (100...1000mbar) |
| Accuracy PSG552 | ±50% of reading (5×10⁻⁵...1×10⁻³mbar), ±15% of reading (1×10⁻³...100mbar), ±50% of reading (100...1000mbar) |
| Accuracy PSG554 | ±50% of reading (5×10⁻⁵...1×10⁻³mbar), ±15% of reading (1×10⁻³...100mbar), ±50% of reading (100...1000mbar) |
| Repeatability | ±2% of reading (1×10⁻³...100mbar) |
| Max Pressure | 10bar |
| Admissible Temperature | Operation: +10...+50°C, Storage: -20...+65°C |
| Bakeout Temperature | ≤80°C (flange), ≤250°C (long tube) |
| Supply Voltage | +15...+30V/A (dc) |
| Power Consumption | ≤2.5W (without fieldbus), ≤3W (DeviceNet), ≤3W (Profibus DP), ≤4.5W (EtherCAT) |
| Output Signal Analog | 0...+10V (3PIx-xxx-xxx0), 0...+8.5V (3PIx-xxx-xxx1), 0...+5.529V (3PIx-xxx-xxx2), 0...+8.875V (3PIx-xxx-xxx3) |
| Voltage vs Pressure | 1.286V/Decade (3PIx-xxx-xxx0), 1V/Decade (3PIx-xxx-xxx1), 1V/Decade (3PIx-xxx-xxx2), 1V/Decade (3PIx-xxx-xxx3) |
| Load Impedance | >10kΩ |
| Setpoint Relay | 2 |
| Relay Range | 5×10⁻⁵...1000mbar |
| Relay Contact | NO |
| Relay Contact | potential free |
| Hysteresis | 10% of threshold |
| Contact Rating | Solid state relays: ≤30V/≤0.3A (dc), Mechanical relays: ≤30V/≤1A (dc) |
| Switching Time | ≤30ms |
| Interface (Digital) | RS232C |
| Cable Length | <100m (<330ft) |
| RS232C Operation | <30m (<100ft) |
| Materials Exposed to Vacuum PSG550 | W |
| Materials Exposed to Vacuum PSG550 | Ni |
| Materials Exposed to Vacuum PSG550 | NiFe |
| Materials Exposed to Vacuum PSG550 | glass |
| Materials Exposed to Vacuum PSG550 | SnAg |
| Materials Exposed to Vacuum PSG550 | stainless steel |
| Materials Exposed to Vacuum PSG552 | Ni |
| Materials Exposed to Vacuum PSG552 | NiFe |
| Materials Exposed to Vacuum PSG552 | glass |
| Materials Exposed to Vacuum PSG552 | SnAg |
| Materials Exposed to Vacuum PSG552 | stainless steel |
| Materials Exposed to Vacuum PSG554 | Al₂O₃, stainless steel |
| Internal Volume DN16 ISO-KF | 4.7cm³ |
| Internal Volume DN16 ISO-KF Long Tube | 14.5cm³ |
| Internal Volume DN16 CF-F | 8cm³ |
| Internal Volume DN16 CF-R Long Tube | 14cm³ |
| Internal Volume DN25 ISO-KF, 4 VCR | 5.5cm³ |
| Internal Volume 8 VCR | 7cm³ |
| Internal Volume 1/8in. NPT, 7/16-20 UNF | 5.2cm³ |
| Internal Volume Surface Mount 29mm (1.15in.) | 4.9cm³ |
| Internal Volume 4 VCR 90° | 7.9cm³ |
| Weight Without Fieldbus Interface | 115...130g |
| Weight With Fieldbus Interface | 230...250g |
| Degree of Protection | IP40 |
| Standards | EN61000-6-2/-6-3, EN61010, UL61010-1, CSA22.2 No.61010-1 |
Applications
1. Vacuum pressure measurement 2. Safety circuits in vacuum systems 3. General vacuum measurement and control from low to high vacuum range
Key Features
1. Available with tungsten (PSG550), nickel (PSG552), or ceramic-coated (PSG554) sensor units for diverse applications 2. Optional display, setpoints, and digital interfaces such as EtherCAT, DeviceNet 3. Latest EtherCAT protocol generation 2.0 4. Easy to exchange plug-and-play sensor element with on-board calibration data 5. Selectable output signal and various plug versions for easy integration 6. Measuring performance independent of mounting orientation 7. Diagnostic port on all versions 8. Compliance with CE, EN, UL, CSA, RoHS standards
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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