PPG570 ATM to Medium Vacuum Gauge + ATM Switch

PPG570 ATM to Medium Vacuum Gauge + ATM Switch

Supplier
Inficon
Part Number
PPG570 ATM to Medium Vacuum Gauge + ATM Switch
Category
Other
Origin
China

The PPG570 is a Pirani Piezo combination gauge based on advanced MEMS sensor technology, designed for accurate pressure measurement from atmospheric to medium vacuum levels.

Specification Snapshot
Response Time (ISO 19685:2017)
<20ms
Power Consumption
≤3.5W
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Overview

The PPG570 is a Pirani Piezo combination gauge based on advanced MEMS sensor technology, designed for accurate pressure measurement from atmospheric to medium vacuum levels.

Specifications

ParameterValue
Measuring PrincipleMEMS Piezo resistive diaphragm
Pressure Range2...1333mbar
Measuring Range1×10^-6...1333mbar
Accuracy (1100...1333mbar)0.5% of reading
Accuracy (800...1099mbar)0.25% of reading
Accuracy (100...800mbar)0.5% of reading
Accuracy (2...99.9mbar)1% of reading
Accuracy (1×10^-4...1.99mbar)5% of reading
Accuracy (1×10^-5...9.99×10^-5mbar)25% of reading
Hysteresis (1×10^-3...10mbar)1%
Hysteresis (10...1333mbar)0.1%
Barometric Measurement Range300...1200mbar
Barometric Accuracy±0.5mbar
Atmospheric Referenced Pressure Output Range-1333...+1333mbar
Vacuum Temperature Sensor Range-20...+85°C
Vacuum Temperature Sensor Accuracy±1.5°C
Transducer Temperature Sensor Range-20...+85°C
Transducer Temperature Sensor Accuracy±1.5°C
Analog Output Resolution16bit (150 microvolt)
Analog Output Update Rate124Hz
Response Time (ISO 19685:2017)<20ms
Temperature Compensation+10...+50°C
Temperature Measurement Range-40...+80°C
Temperature Measurement Absolute Accuracy±1.5°C (0...+80°C)
Gas Type DependenceRefer to operating manual page 13
Set Point Range (Absolute)5×10^-6...1333mbar
Set Point Range (Relative)-1100...+500mbar
Solid State Relay Contact Rating50V
Solid State Relay Contact Current100mA
Solid State Relay Contact Resistance<35Ω
Solid State Relay Contact EnduranceUnlimited (no mechanical wear)
Analog Output (3PPM-xxx-xxx0)0.61...10.2V
Analog Output (3PPM-xxx-xxx2)0.375...5.57V
Analog Output (3PPM-xxx-xxx3)1.0...9V
Analog Output (3PPM-xxx-xxxZ)No analog signal
Error SignalRefer to operating manual page 13
Supply Voltage at the Gauge12...30V(dc)
Power Supply RippleMax. 1V
Power Consumption≤3.5W
Internal Fuse100mA (thermal recoverable)
Reverse Polarity and Overvoltage ProtectionYes
Dimension A (DN16 ISO-KF)12mm
Dimension B (DN16 ISO-KF)39.4mm
Dimension A (DN16 ISO-KF, long tube)29mm
Dimension B (DN16 ISO-KF, long tube)56.4mm
Dimension A (DN25 ISO-KF)12mm
Dimension B (DN25 ISO-KF)39.4mm
Dimension A (4 VCR female)37.5mm
Dimension B (4 VCR female)64.9mm
Dimension A (1/8" NPT)37.0mm
Dimension B (1/8" NPT)64.4mm
Weight (DN16 ISO-KF)≈136g
Weight (DN16 ISO-KF, long tube)≈154g
Weight (DN25 ISO-KF)≈155g
Weight (4 VCR Female)≈158g
Weight (1/8" NPT)≈139g

Applications

1. Semiconductor industries 2. Vacuum applications requiring accurate pressure measurement relative to atmospheric pressure 3. Load-lock applications

Key Features

1. Gas type independent above 2mbar, allowing safe venting with any gas mixture 2. High accuracy and reproducibility at atmospheric pressure for reliable and fast detection 3. Atmospheric ambient pressure measurement 4. Up to 3 solid-state relays 5. Versatile mounting orientation for engineering flexibility 6. Selectable analog output signal for easy system integration 7. Digital interfaces RS232/RS485 8. Direct drop-in replacement for MKS901P MicroPirani and Piezo Loadlock Vacuum Pressure Transducer 9. Compliance with CE, EN, UL, CSA, and RoHS standards

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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