PCG55x Atmospheric to Medium Vacuum Gauge

PCG55x Atmospheric to Medium Vacuum Gauge

Supplier
Inficon
Part Number
PCG55x Atmospheric to Medium Vacuum Gauge
Category
Other
Origin
China

The INFICON PCG55x combines piezo technology with ceramic diaphragm sensors to provide accurate pressure measurement in a single device.

Specification Snapshot
Power Consumption without Fieldbus (W)
≤2.5
DeviceNet Power Consumption (W)
≤3
Profibus Power Consumption (W)
≤3
EtherCAT Power Consumption (W)
≤4.5
Cable Length (m)
≤100
DeviceNet Cable Length 125 kbps (m)
500
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Overview

The INFICON PCG55x combines piezo technology with ceramic diaphragm sensors to provide accurate pressure measurement in a single device.

Specifications

ParameterValue
Measurement Range (mbar)5×10⁻⁵…1500
Measurement Range (Torr)3.8×10⁻⁵…1125
Accuracy 5×10⁻⁴…1×10⁻³ mbar±50% of reading
Accuracy 1×10⁻³…100 mbar±15% of reading
Accuracy 100…950 mbar±5% of reading
Accuracy 950…1050 mbar±2.5% of reading
Repeatability 1×10⁻³…1100 mbar±2% of reading
Allowable Pressure (bar absolute)≤5
Allowable Temperature Operation (°C)+10…+50
Allowable Temperature Storage (°C)-20…+65
Bakeout Temperature at Flange (°C)≤80
Bakeout Temperature at Long Flange (°C)≤250
Supply Voltage (Vdc)+15…+30
Power Consumption without Fieldbus (W)≤2.5
DeviceNet Power Consumption (W)≤3
Profibus Power Consumption (W)≤3
EtherCAT Power Consumption (W)≤4.5
Analog Output Signal 3PCx-0xx-xxx1V+0.61…+10.23
Analog Output Signal 3PCx-0xx-xxx2V+1.2…+8.68
Analog Output Signal 3PCx-0xx-xxx3V+0.375…+5.659
Analog Output Signal 3PCx-0xx-xxx4V+1.57…+9.05
Voltage per Decade1.286
Load Resistance (kΩ)>10
Setpoint Relay Number2
Setpoint Relay Range (mbar)5×10⁻⁵…1000
Setpoint Relay Hysteresis (%)10
Setpoint Relay Contact Voltage (Vdc)≤30
Setpoint Relay Contact Current (Adc)≤1
Electrical Connection FCC8-pin
Electrical Connection D-Sub9-pin, male
Electrical Connection D-Sub-HD15-pin, male
Electrical Connection RS48515-pin HD, male
Cable Length (m)≤100
RS232C Operation (m)≤30
Materials Exposed to VacuumW, Ni, NiFe, Al₂O₃, SnAg, stainless steel, glass
Internal Volume DN16 ISO-KF (cm³)4.7
Internal Volume DN16 ISO-KF Long Tube (cm³)14.5
Internal Volume DN16 CF-F (cm³)8
Internal Volume DN16 CF-R Long Tube (cm³)14
Internal Volume DN25 ISO-KF, 4 VCR (cm³)5.5
Internal Volume 8 VCR (cm³)7
Internal Volume 1/8 NPT, 7/16-20 UNF (cm³)5.2
Internal Volume Surface Mount 29 mm/1.15 inch (cm³)4.9
Internal Volume 4 VCR 90° (cm³)7.9
Weight without Fieldbus Interface (g)115…130
Weight with Fieldbus Interface (g)230…250
Protection ClassIP40
Standard CE ComplianceEN61000-6-2/-6-3, EN61000-6-2/-6-3, EN61010
ETL CertificationUL61010-1, CSA22.2
DeviceNet ProtocolDeviceNet™ group 2 slave only
MAC ID2 switches (address 00-63) or network programmable
Digital FunctionsRead pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error
I/O Attribute CommunicationPolling only
DeviceNet ConnectorMicro-Style, 5-pin, male
DeviceNet Data Rate (kBaud)125, 250, 500 or network programmable
DeviceNet Cable Length 125 kbps (m)500
DeviceNet Cable Length 250 kbps (m)250
DeviceNet Cable Length 500 kbps (m)100
DeviceNet Power Supply Voltage (Vdc)+15…+30
DeviceNet Power (W)≤3
Profibus DP Baud Rate (kBaud)9.6/19.2/93.75/187.5/500
Profibus DP Address2 switches (address 00-127) or network programmable
RS485C Baud Rate (kBaud)9.6/19.2/38.4/57.6
RS485C Address2 switches (address 00-255)
RS485 ConnectorD-Sub, 15-pin HD, male
EtherCAT ProtocolProtocol specialized for EtherCAT
Communication StandardETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge
Node AddressExplicit Device Identification
Physical Layer100BASE-Tx (IEEE802.3)
EtherCAT Connector2×RJ45, 8-pin (socket), IN and OUT
CableShielded Ethernet CAT5e or higher
Process DataFixed PDO mapping and configurable PDO mapping
Mailbox (CoE)SDO requests
Mailbox (CoE)responses and information
EtherCAT Cable Length (m)≤100

Applications

1. Semiconductor manufacturing 2. Vacuum coating processes 3. Laboratory vacuum systems 4. Industrial vacuum applications

Key Features

1. Combines piezo technology with ceramic diaphragm sensors 2. Provides accurate pressure measurement 3. Compatible with various applications 4. Flexible installation options 5. Supports multiple output signals and interfaces

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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