MAG470 Inverted Magnetron Gauge

MAG470 Inverted Magnetron Gauge

Supplier
Inficon
Part Number
MAG470 Inverted Magnetron Gauge
Category
Other
Origin
China

The INFICON MAG470 Inverted Magnetron Gauge is designed for ultra-high vacuum pressure monitoring, offering precise measurements in the range of 5×10⁻¹¹ mbar to 1×10⁻² mbar (3.8×10⁻¹¹ Torr to 7.5×10⁻³ Torr).

Specification Snapshot
Power Consumption
≤2W
Response Time - p>10⁻⁶mbar
<10ms
Cable Length
<50m (8×0.14mm²)
Operating Voltage
<3.3kV
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Overview

The INFICON MAG470 Inverted Magnetron Gauge is designed for ultra-high vacuum pressure monitoring, offering precise measurements in the range of 5×10⁻¹¹ mbar to 1×10⁻² mbar (3.8×10⁻¹¹ Torr to 7.5×10⁻³ Torr).

Specifications

ParameterValue
Measurement Range (air, N₂)5×10⁻¹¹ mbar to 1×10⁻² mbar (3.8×10⁻¹¹ Torr to 7.5×10⁻³ Torr)
Accuracy (N₂)±30% of reading
Repeatability (N₂)±5% of reading
Mounting Orientationany
Admissible Pressure (absolute)≤10bar (limited to inert gases)
Admissible Temperature - Operation (ambient)+5°C to +55°C
Admissible Temperature - Storage-40°C to +65°C
Bake-out Temperature≤250°C (extended version)
Supply Voltage - At Gauge+15V to +30V (dc)
Supply Voltage - At Supply Unit with Max Cable Length+16V to +30V (dc)
Ripple≤1Vₚ
Power Consumption≤2W
Fuse to be Connected≤1AT
Output Signal - Voltage Range0V to +10.5V
Output Signal - Measurement Range+1.96V to +8.6V
Output Signal - Voltage vs PressureLogarithmic, 0.8V/decade
Error Signal<0.5V (no supply)
Output Impedance2×10Ω
Minimum Loaded Impedance10kΩ, short-circuit proof
Response Time - p>10⁻⁶mbar<10ms
Response Time - p=10⁻⁸mbar≈1000ms
Identification Gauge7.15kΩ, referenced to supply common
Electrical ConnectionFCC68 appliance connector, 8 poles, female
Sensor Cable8 poles plus shielding
Cable Length<50m (8×0.14mm²)
Operating Voltage<3.3kV
Operating Current<100μA
Materials Exposed to VacuumStainless steel, Al₂O₃, Ag
Internal Volume≈20cm³
Weight - MAG470≈950g
Weight - MAG470 Extended≈1100g
Protection CategoryIP40
StandardsEN61000-6-2, EN61000-6-3, EN61010-1

Applications

1. Ultra-high vacuum pressure monitoring 2. Base pressure for evaporation and sputtering systems 3. General vacuum measurement and control in the medium and high vacuum range

Key Features

1. No filament to burn out 2. Extended version, sensor bakeout up to 250°C 3. Excellent ignition properties 4. Easy to clean 5. Metal-sealed feedthrough 6. LED indicator for high voltage on 7. Logarithmic analog output signal

Datasheet

Product Datasheet
PDF
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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