MAG470 Inverted Magnetron Gauge
The INFICON MAG470 Inverted Magnetron Gauge is designed for ultra-high vacuum pressure monitoring, offering precise measurements in the range of 5×10⁻¹¹ mbar to 1×10⁻² mbar (3.8×10⁻¹¹ Torr to 7.5×10⁻³ Torr).
Specification Snapshot
Power Consumption
≤2W
Response Time - p>10⁻⁶mbar
<10ms
Cable Length
<50m (8×0.14mm²)
Operating Voltage
<3.3kV
Request a Quote
Download Datasheet
Chat
Overview
The INFICON MAG470 Inverted Magnetron Gauge is designed for ultra-high vacuum pressure monitoring, offering precise measurements in the range of 5×10⁻¹¹ mbar to 1×10⁻² mbar (3.8×10⁻¹¹ Torr to 7.5×10⁻³ Torr).
Specifications
| Parameter | Value |
|---|---|
| Measurement Range (air, N₂) | 5×10⁻¹¹ mbar to 1×10⁻² mbar (3.8×10⁻¹¹ Torr to 7.5×10⁻³ Torr) |
| Accuracy (N₂) | ±30% of reading |
| Repeatability (N₂) | ±5% of reading |
| Mounting Orientation | any |
| Admissible Pressure (absolute) | ≤10bar (limited to inert gases) |
| Admissible Temperature - Operation (ambient) | +5°C to +55°C |
| Admissible Temperature - Storage | -40°C to +65°C |
| Bake-out Temperature | ≤250°C (extended version) |
| Supply Voltage - At Gauge | +15V to +30V (dc) |
| Supply Voltage - At Supply Unit with Max Cable Length | +16V to +30V (dc) |
| Ripple | ≤1Vₚ |
| Power Consumption | ≤2W |
| Fuse to be Connected | ≤1AT |
| Output Signal - Voltage Range | 0V to +10.5V |
| Output Signal - Measurement Range | +1.96V to +8.6V |
| Output Signal - Voltage vs Pressure | Logarithmic, 0.8V/decade |
| Error Signal | <0.5V (no supply) |
| Output Impedance | 2×10Ω |
| Minimum Loaded Impedance | 10kΩ, short-circuit proof |
| Response Time - p>10⁻⁶mbar | <10ms |
| Response Time - p=10⁻⁸mbar | ≈1000ms |
| Identification Gauge | 7.15kΩ, referenced to supply common |
| Electrical Connection | FCC68 appliance connector, 8 poles, female |
| Sensor Cable | 8 poles plus shielding |
| Cable Length | <50m (8×0.14mm²) |
| Operating Voltage | <3.3kV |
| Operating Current | <100μA |
| Materials Exposed to Vacuum | Stainless steel, Al₂O₃, Ag |
| Internal Volume | ≈20cm³ |
| Weight - MAG470 | ≈950g |
| Weight - MAG470 Extended | ≈1100g |
| Protection Category | IP40 |
| Standards | EN61000-6-2, EN61000-6-3, EN61010-1 |
Applications
1. Ultra-high vacuum pressure monitoring 2. Base pressure for evaporation and sputtering systems 3. General vacuum measurement and control in the medium and high vacuum range
Key Features
1. No filament to burn out 2. Extended version, sensor bakeout up to 250°C 3. Excellent ignition properties 4. Easy to clean 5. Metal-sealed feedthrough 6. LED indicator for high voltage on 7. Logarithmic analog output signal
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
Contact Us
Loading...
GetExperimental Plan
Name
Phone
+86
Organization
Use Case

Global Photonics Products
Database Platform
Database Platform
With 16 years of experience, we provide high-quality products and services to universities, research institutes, and industry.
50+ Detailed Categories · 3,000+ Global Brands · 100,000+ Photonics Products
1 Million+
In-depth analysis of professional academic resources in photonics
300,000
ProductsDatasheets Available Free
We will keep your personal information strictly confidential.
Product Quote
+86
* Select the quoting party:
By submitting, you agree to the User Service Agreement and Privacy Policy