MAG084

MAG084

Supplier
Inficon
Part Number
MAG084
Category
Other
Origin
China

The INFICON passive Cold Cathode Heads MAG084 is designed for use with the INFICON passive Vacuum Gauge Controller VGC094. It is a compact and rugged gauge suitable for numerous industrial applications, featuring a metal seal and SHV coaxial male connector for reliable pressure measurements in the UHV range.

Specification Snapshot
Operating Voltage (Measuring Chamber)
≤3.3kV
Dimensions (Height)
109mm (DN 40 CF-F), 104mm (DN 40 ISO-KF)
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Overview

The INFICON passive Cold Cathode Heads MAG084 is designed for use with the INFICON passive Vacuum Gauge Controller VGC094. It is a compact and rugged gauge suitable for numerous industrial applications, featuring a metal seal and SHV coaxial male connector for reliable pressure measurements in the UHV range.

Specifications

ParameterValue
Measurement Systemcold cathode ionization (inverted magnetron principle)
Display Range (Air N2)5×10^-9mbar to 1×10^-2mbar
Measurement Range (Air N2)1×10^-8mbar to 5×10^-3mbar
Accuracy (Air N2)30% of reading
Repeatability (typical)5% of reading
Overpressure≤9bar for inert gas
Mounting Orientationany
Admissible Temperature (Operation)+5°C to +80°C (standard cable), +5°C to +230°C (high temperature cable)
Admissible Temperature (Bakeout)+230°C
Admissible Temperature (Storage)-40°C to +80°C
Mechanical Integrity+250°C
Relative Humiditymax. 80% at +30°C, decreasing to 50% at +40°C
Use Environmentindoors only
Use Environmentunlimited altitude
Radiation Resistance10^7Gy
External Magnetic Field (Axial Direction)≤140mT (<10% at 25°C), ≤120mT (<10% at 230°C), ≤340mT (<200% at 25°C), ≤340mT (<200% at 230°C)
External Magnetic Field (Radial Direction)≤160mT (<10% at 25°C), ≤160mT (<10% at 230°C), ≤195mT (<200% at 25°C), ≤185mT (<200% at 230°C)
Operating Voltage (Measuring Chamber)≤3.3kV
Operating Current (Measuring Chamber)≤600μA (CP900C9 board)
Electrical ConnectionSHV coaxial cable
Vacuum Connectionstainless steel (EN 1.4306)
Measuring Chamberstainless steel (EN 1.4306)
Feedthrough Isolationceramic (Al2O3)
Internal SealAg
AnodeMo
Ignition Aidstainless steel (EN 1.4330)
Ionization Chamberstainless steel (EN 1.4301, EN 1.4016)
MagnetNdFeB
Internal Volume (DN 40 ISO-KF)~23.9cm³
Internal Volume (DN 40 CF-F)~26.1cm³
Dimensions (Height)109mm (DN 40 CF-F), 104mm (DN 40 ISO-KF)
Dimensions (Diameter)50mm

Applications

1. Special Fusion applications 2. R&D applications presenting strong external magnetic fields

Key Features

1. Developed for strong magnetic fields 2. Reliable and proven gauge head design 3. Bakeable to 230°C 4. Good ignition properties, corrosion resistant with ceramic feedthrough 5. Radiation resistant design to 1×10^7Gy 6. Easy to maintain, low cost of ownership

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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