IRG080 Ion Reference Gauge - Passive
The INFICON Ion Reference Gauge IRG080 is a first-of-its-kind vacuum sensor designed for precise total pressure measurement in vacuum systems. It operates on an innovative ionization vacuum gauge concept, where a hot cathode emits electrons traveling on a straight path into a Faraday cup. This gauge is ideal for calibration purposes and precise vacuum measurement in industrial applications.
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Overview
The INFICON Ion Reference Gauge IRG080 is a first-of-its-kind vacuum sensor designed for precise total pressure measurement in vacuum systems. It operates on an innovative ionization vacuum gauge concept, where a hot cathode emits electrons traveling on a straight path into a Faraday cup. This gauge is ideal for calibration purposes and precise vacuum measurement in industrial applications.
Specifications
| Parameter | Value |
|---|---|
| Measurement System | hot cathode ionization |
| Electrode System Configuration | according to ISO TS 6737 |
| Measurement Range (N2) | <1×10^-8...1×10^-4mbar, <1×10^-8...1×10^-2Pa |
| Sensitivity (N2, typical) | 29mbar^-1 |
| Accuracy (N2, typical) | ±1% of reading |
| Repeatability (typical) | 1% of reading |
| Mounting Orientation | recommended aligned with magnetic field |
| Admissible Temperature (Ambient, in operation) | +20...+80°C |
| Admissible Temperature (Storage) | +20...+50°C |
| Relative Humidity | ≤85% (non-condensing) |
| Admissible External Magnetic Field | ≤50μT |
| Max. Flange Temp. (with temperature resistant cable) | +165°C |
| Max. Bake-out Temp. (without plug and connector plate unit) | +400°C |
| Max. Bake-out Temp. (without plug and connector plate unit, with Mu-metal intermediate piece) | +200°C |
| Cathode Potential | +50V |
| Wehnelt Potential | +34V |
| Anode Potential | +250V |
| Deflector Potential | 45V |
| Faraday Cup Potential | +280V |
| Emission Current Range | 10...100μA |
| Cathode Heater Current/Voltage (typ.) | 1.4...1.8A/2V |
| Flange Connection | DN 63 CF-R |
| Gauge Connections | Bayonet (BNC), Push-pull self-latching, 7-pin |
| Materials Exposed to Vacuum | stainless steel (EN 1.4301), NiFeCo (EN 1.3981), ceramic (Al2O3), Ta, W, Kovar, Al2O3, stainless steel (EN 1.4404, EN 1.4435), stainless steel (EN 1.4335 ESU) |
| Internal Volume | 385cm³ |
| Weight | 4.3kg |
Applications
1. Metrology and transfer standards to national and calibration laboratories 2. Advanced scientific and industrial applications requiring precise vacuum pressure measurement for quality assurance 3. Calibration of other vacuum gauges and mass spectrometers, pump speed measurement
Key Features
1. High measurement accuracy in high and ultra-high vacuum range 2. Predictable gas sensitivity with small uncertainty 3. Stable electron emission unaffected by ESD or X-ray effects 4. Reproducible and easy to transport 5. Bakeable to +165°C with temperature resistant cable or up to +400°C without connector unit 6. Mu-metal intermediate piece available for magnetic shielding purposes
Datasheet
Product Datasheet
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Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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