IRG080 Ion Reference Gauge - Passive

IRG080 Ion Reference Gauge - Passive

Supplier
Inficon
Part Number
IRG080 Ion Reference Gauge - Passive
Category
Other
Origin
China

The INFICON Ion Reference Gauge IRG080 is a first-of-its-kind vacuum sensor designed for precise total pressure measurement in vacuum systems. It operates on an innovative ionization vacuum gauge concept, where a hot cathode emits electrons traveling on a straight path into a Faraday cup. This gauge is ideal for calibration purposes and precise vacuum measurement in industrial applications.

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Overview

The INFICON Ion Reference Gauge IRG080 is a first-of-its-kind vacuum sensor designed for precise total pressure measurement in vacuum systems. It operates on an innovative ionization vacuum gauge concept, where a hot cathode emits electrons traveling on a straight path into a Faraday cup. This gauge is ideal for calibration purposes and precise vacuum measurement in industrial applications.

Specifications

ParameterValue
Measurement Systemhot cathode ionization
Electrode System Configurationaccording to ISO TS 6737
Measurement Range (N2)<1×10^-8...1×10^-4mbar, <1×10^-8...1×10^-2Pa
Sensitivity (N2, typical)29mbar^-1
Accuracy (N2, typical)±1% of reading
Repeatability (typical)1% of reading
Mounting Orientationrecommended aligned with magnetic field
Admissible Temperature (Ambient, in operation)+20...+80°C
Admissible Temperature (Storage)+20...+50°C
Relative Humidity≤85% (non-condensing)
Admissible External Magnetic Field≤50μT
Max. Flange Temp. (with temperature resistant cable)+165°C
Max. Bake-out Temp. (without plug and connector plate unit)+400°C
Max. Bake-out Temp. (without plug and connector plate unit, with Mu-metal intermediate piece)+200°C
Cathode Potential+50V
Wehnelt Potential+34V
Anode Potential+250V
Deflector Potential45V
Faraday Cup Potential+280V
Emission Current Range10...100μA
Cathode Heater Current/Voltage (typ.)1.4...1.8A/2V
Flange ConnectionDN 63 CF-R
Gauge ConnectionsBayonet (BNC), Push-pull self-latching, 7-pin
Materials Exposed to Vacuumstainless steel (EN 1.4301), NiFeCo (EN 1.3981), ceramic (Al2O3), Ta, W, Kovar, Al2O3, stainless steel (EN 1.4404, EN 1.4435), stainless steel (EN 1.4335 ESU)
Internal Volume385cm³
Weight4.3kg

Applications

1. Metrology and transfer standards to national and calibration laboratories 2. Advanced scientific and industrial applications requiring precise vacuum pressure measurement for quality assurance 3. Calibration of other vacuum gauges and mass spectrometers, pump speed measurement

Key Features

1. High measurement accuracy in high and ultra-high vacuum range 2. Predictable gas sensitivity with small uncertainty 3. Stable electron emission unaffected by ESD or X-ray effects 4. Reproducible and easy to transport 5. Bakeable to +165°C with temperature resistant cable or up to +400°C without connector unit 6. Mu-metal intermediate piece available for magnetic shielding purposes

Datasheet

Product Datasheet
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Supplier Information

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Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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