IE414 & IE514 Sensors
The IE414 and IE514 are high-end vacuum sensors based on the hot cathode ionization effect. The IE414 is a Bayard-Alpert gauge, while the IE514 is based on the extractor principle. These passive gauges are controlled by the IM540 vacuum gauge controller, offering precise vacuum measurement capabilities.
Specification Snapshot
Dimensions IE414
69.4mm diameter, 90mm height
Dimensions IE514
69.4mm diameter, 98mm height
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Overview
The IE414 and IE514 are high-end vacuum sensors based on the hot cathode ionization effect. The IE414 is a Bayard-Alpert gauge, while the IE514 is based on the extractor principle. These passive gauges are controlled by the IM540 vacuum gauge controller, offering precise vacuum measurement capabilities.
Specifications
| Parameter | Value |
|---|---|
| Measurement System | Hot cathode ionization |
| Electrode System Configuration IE414 | Bayard-Alpert |
| Electrode System Configuration IE514 | Extractor system |
| Measurement Range (N2) IE414 | 2×10^-11...1×10^-2mbar |
| Measurement Range (N2) IE514 | 2×10^-12...1×10^-4mbar |
| X-ray Limit IE414 | <1×10^-11mbar |
| X-ray Limit IE514 | <1×10^-12mbar |
| Sensitivity (N2, typical) IE414 | 17mbar^-1 |
| Sensitivity (N2, typical) IE514 | 6.25mbar^-1 |
| Admissible Temperature - Ambient, in Operation | 20...+80°C |
| Admissible Temperature - Max. Flange Temp. with Heat Resistant Gauge Head Cable Set | 250°C |
| Admissible Temperature - Max. Bake-out Temperature without Plugs | 400°C |
| Admissible Temperature - Storage Temperature | +20...+50°C |
| Relative Humidity - Annual Average | ≤65% (non-condensing) |
| Relative Humidity - On 60 Days | ≤85% (non-condensing) |
| Use | Within indoor rooms only, altitude up to 2000m above sea level |
| Cathode (Filament) Heating Current | 1.5A |
| Cathode (Filament) Heating Voltage IE414 | 3V |
| Cathode (Filament) Heating Voltage IE514 | 3.7V |
| Cathode (Filament) Potential IE414 | +80V |
| Cathode (Filament) Potential IE514 | +100V |
| Emission Current Range | 0.1...10mA |
| Anode (Grid) Potential IE414 | +220V |
| Anode (Grid) Potential IE514 | +205V |
| Reflector Potential IE514 | +205V |
| Max. Power When Baking Out IE414 | 90mA/480V |
| Max. Power When Baking Out IE514 | 45mA/480V |
| Flange Connection | DN 40 CF |
| Materials Exposed to Vacuum | NiFe |
| Lead-in Pins | NiFe |
| Insulator | Al2O3 ceramic |
| Pin Sealing Plate | NiFe |
| Flange | Stainless steel |
| Cathode | Iridium with yttrium oxide coating |
| Anode IE414 | Molybdenum |
| Anode IE514 | Stainless steel |
| Collector | Tungsten |
| Reflector | NiFe |
| Dimensions IE414 | 69.4mm diameter, 90mm height |
| Dimensions IE514 | 69.4mm diameter, 98mm height |
Applications
1. Scientific applications requiring precise vacuum measurement 2. R&D applications in the ultra-high vacuum range 3. High-temperature bake-out processes
Key Features
1. High accuracy with individually calibrated sensors 2. Exchangeable cathode 3. High-temperature bake-out up to 400°C 4. Bayard-Alpert sensing principle (IE414) 5. Extractor sensing principle (IE514) 6. Significant reduction of X-ray and ion desorption effects (IE514)
Datasheet
Product Datasheet
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Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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