IE414 & IE514 Sensors

IE414 & IE514 Sensors

Supplier
Inficon
Part Number
IE414 & IE514 Sensors
Category
Other
Origin
China

The IE414 and IE514 are high-end vacuum sensors based on the hot cathode ionization effect. The IE414 is a Bayard-Alpert gauge, while the IE514 is based on the extractor principle. These passive gauges are controlled by the IM540 vacuum gauge controller, offering precise vacuum measurement capabilities.

Specification Snapshot
Dimensions IE414
69.4mm diameter, 90mm height
Dimensions IE514
69.4mm diameter, 98mm height
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Overview

The IE414 and IE514 are high-end vacuum sensors based on the hot cathode ionization effect. The IE414 is a Bayard-Alpert gauge, while the IE514 is based on the extractor principle. These passive gauges are controlled by the IM540 vacuum gauge controller, offering precise vacuum measurement capabilities.

Specifications

ParameterValue
Measurement SystemHot cathode ionization
Electrode System Configuration IE414Bayard-Alpert
Electrode System Configuration IE514Extractor system
Measurement Range (N2) IE4142×10^-11...1×10^-2mbar
Measurement Range (N2) IE5142×10^-12...1×10^-4mbar
X-ray Limit IE414<1×10^-11mbar
X-ray Limit IE514<1×10^-12mbar
Sensitivity (N2, typical) IE41417mbar^-1
Sensitivity (N2, typical) IE5146.25mbar^-1
Admissible Temperature - Ambient, in Operation20...+80°C
Admissible Temperature - Max. Flange Temp. with Heat Resistant Gauge Head Cable Set250°C
Admissible Temperature - Max. Bake-out Temperature without Plugs400°C
Admissible Temperature - Storage Temperature+20...+50°C
Relative Humidity - Annual Average≤65% (non-condensing)
Relative Humidity - On 60 Days≤85% (non-condensing)
UseWithin indoor rooms only, altitude up to 2000m above sea level
Cathode (Filament) Heating Current1.5A
Cathode (Filament) Heating Voltage IE4143V
Cathode (Filament) Heating Voltage IE5143.7V
Cathode (Filament) Potential IE414+80V
Cathode (Filament) Potential IE514+100V
Emission Current Range0.1...10mA
Anode (Grid) Potential IE414+220V
Anode (Grid) Potential IE514+205V
Reflector Potential IE514+205V
Max. Power When Baking Out IE41490mA/480V
Max. Power When Baking Out IE51445mA/480V
Flange ConnectionDN 40 CF
Materials Exposed to VacuumNiFe
Lead-in PinsNiFe
InsulatorAl2O3 ceramic
Pin Sealing PlateNiFe
FlangeStainless steel
CathodeIridium with yttrium oxide coating
Anode IE414Molybdenum
Anode IE514Stainless steel
CollectorTungsten
ReflectorNiFe
Dimensions IE41469.4mm diameter, 90mm height
Dimensions IE51469.4mm diameter, 98mm height

Applications

1. Scientific applications requiring precise vacuum measurement 2. R&D applications in the ultra-high vacuum range 3. High-temperature bake-out processes

Key Features

1. High accuracy with individually calibrated sensors 2. Exchangeable cathode 3. High-temperature bake-out up to 400°C 4. Bayard-Alpert sensing principle (IE414) 5. Extractor sensing principle (IE514) 6. Significant reduction of X-ray and ion desorption effects (IE514)

Datasheet

Product Datasheet
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Supplier Information

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Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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