Transpector CPX Residual Gas Analyzer
The Transpector CPX Residual Gas Analyzer is a compact and advanced process monitoring solution designed for real-time analysis and optimization in semiconductor manufacturing and other high-tech industries. It offers precise gas analysis, enhanced performance, and proven reliability.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Maximum Mass Range | 100amu, 200amu, 300amu |
| Total Pressure Range | 1×10^-8 to 5×10^-2mbar |
| Ion Source Type | Single Filament Closed Ion Source |
| Total Pressure Source Operating Pressure | 1×10^-8 to 5×10^-2mbar |
| Maximum Total Pressure | 5×10^-2mbar |
| Sensitivity (Low Emission, FC Mode) | ≥1E-4A/mbar |
| Sensitivity (High Emission, FC Mode) | ≥2E-4A/mbar |
| Minimum Detectable Partial Pressure | 1×10^-14mbar |
| Dynamic Range | 10 decades |
| Resolution (M/ΔM) | 1.0 |
| Scan Rate (Points per Second) | ≤500 |
| Electron Multiplier Lifetime | ≥1×10^8 pulses |
| Power Requirements | 100-240VAC, 50/60Hz, 200W |
| Dimensions | See diagram |
| Weight | See diagram |
Applications
Key Features
Datasheet
Supplier Information
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