UHV Bakeable Sensor
The UHV Bakeable Sensor is designed for high thermal stability and reliability, capable of withstanding continuous bakeout temperatures up to 450°C. It features a front-load design for easy crystal holder insertion and is constructed from durable materials such as stainless steel, molybdenum, and Inconel.
Specification Snapshot
Sensor Head Size
34×35×24mm (BK-AOF), 34×35×31mm (BK-AIF)
Crystal Diameter
13.97mm (0.550in.)
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Overview
The UHV Bakeable Sensor is designed for high thermal stability and reliability, capable of withstanding continuous bakeout temperatures up to 450°C. It features a front-load design for easy crystal holder insertion and is constructed from durable materials such as stainless steel, molybdenum, and Inconel.
Specifications
| Parameter | Value |
|---|---|
| Maximum Temperature | 450°C continuous (BK-AOF), 400°C continuous (BK-AIF) |
| Sensor Head Size | 34×35×24mm (BK-AOF), 34×35×31mm (BK-AIF) |
| Crystal exchange | Front loading, self-contained package |
| Mounting | Four #4-40 tapped holes on the back of the body |
| Feedthrough | CF40 (2¾in. ConFlat), integral with sensor head |
| Water and Coax Lines | 3mm (0.125in.) O.D. water and air × 0.4mm (0.015in.) wall thickness seamless 304 stainless steel; 5mm (0.188in.) O.D. coax |
| Minimum Water Flow | 150–200cm³/min, 30°C max |
| Materials | 304 stainless steel, molybdenum, Inconel X-750, >99% Al₂O₃ insulators |
| Braze | Vacuum process high-temperature Ni-Cr alloy |
| Crystal Diameter | 13.97mm (0.550in.) |
Applications
1. Thin film deposition monitoring 2. High-temperature vacuum environments 3. Semiconductor manufacturing 4. Research and development in material science
Key Features
1. High thermal stability 2. Front-load crystal holder 3. Easy installation 4. CF40 feedthrough 5. Optional crystal shutter
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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