UHV Bakeable Sensor

UHV Bakeable Sensor

Supplier
Inficon
Part Number
UHV Bakeable Sensor
Category
Sensors
Origin
China

The UHV Bakeable Sensor is designed for high thermal stability and reliability, capable of withstanding continuous bakeout temperatures up to 450°C. It features a front-load design for easy crystal holder insertion and is constructed from durable materials such as stainless steel, molybdenum, and Inconel.

Specification Snapshot
Sensor Head Size
34×35×24mm (BK-AOF), 34×35×31mm (BK-AIF)
Crystal Diameter
13.97mm (0.550in.)
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Overview

The UHV Bakeable Sensor is designed for high thermal stability and reliability, capable of withstanding continuous bakeout temperatures up to 450°C. It features a front-load design for easy crystal holder insertion and is constructed from durable materials such as stainless steel, molybdenum, and Inconel.

Specifications

ParameterValue
Maximum Temperature450°C continuous (BK-AOF), 400°C continuous (BK-AIF)
Sensor Head Size34×35×24mm (BK-AOF), 34×35×31mm (BK-AIF)
Crystal exchangeFront loading, self-contained package
MountingFour #4-40 tapped holes on the back of the body
FeedthroughCF40 (2¾in. ConFlat), integral with sensor head
Water and Coax Lines3mm (0.125in.) O.D. water and air × 0.4mm (0.015in.) wall thickness seamless 304 stainless steel; 5mm (0.188in.) O.D. coax
Minimum Water Flow150–200cm³/min, 30°C max
Materials304 stainless steel, molybdenum, Inconel X-750, >99% Al₂O₃ insulators
BrazeVacuum process high-temperature Ni-Cr alloy
Crystal Diameter13.97mm (0.550in.)

Applications

1. Thin film deposition monitoring 2. High-temperature vacuum environments 3. Semiconductor manufacturing 4. Research and development in material science

Key Features

1. High thermal stability 2. Front-load crystal holder 3. Easy installation 4. CF40 feedthrough 5. Optional crystal shutter

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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