SemiQCM CR Sensor
The SemiQCM CR Sensor is designed for harsh chemical environments, providing a reliable solution for material deposition monitoring, clean endpoint detection, precursor ampoule depletion, and precursor delivery fault detection. It is suitable for advanced CVD and ALD processes, offering sub-monolayer level mass change monitoring.
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Overview
The SemiQCM CR Sensor is designed for harsh chemical environments, providing a reliable solution for material deposition monitoring, clean endpoint detection, precursor ampoule depletion, and precursor delivery fault detection. It is suitable for advanced CVD and ALD processes, offering sub-monolayer level mass change monitoring.
Specifications
| Parameter | Value |
|---|---|
| Maximum temperature | 200°C |
| Sensor head size (maximum envelope) | 23.9mmO.D.x29.2mm(0.94in.O.D.x1.15in.) |
| Sensor length (in vacuum) | 50–150mm(1.97–5.91in.) |
| Mounting feedthrough | ISOKF/CFflange |
| Body and holder material | Aluminum |
| Springs | Beryllium nickel |
| Coax line | 6.4mm(0.250in.)O.D.,nickel625 |
| Other mechanical parts | Nickel200,aluminum,ornickelC276 |
| Insulators | >96%Al2O3invacuum;Teflonusedelsewhere |
| Wire | Niinvacuum,Ni-platedCuelsewhere |
| Braze | Vacuum-processhigh-temperatureNiCralloy |
| Crystal | 14.0mm(0.551in.)diameter |
Applications
1. Material deposition monitoring 2. Clean endpoint detection 3. Precursor ampoule depletion 4. Precursor delivery fault detection 5. Advanced CVD and ALD processes
Key Features
1. Designed for harsh chemical environments 2. Compatible with ISO KF-25, KF-40, or CF-40 ports 3. Supports both straight and right-angle BNC connector options 4. Monitors sub-monolayer level of mass change 5. Integrates with FabGuard software for in-situ process monitoring
Datasheet
Product Datasheet
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Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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