RSH-800 Rotary Sensor Head

RSH-800 Rotary Sensor Head

Supplier
Inficon
Part Number
RSH-800 Rotary Sensor Head
Category
Sensors
Origin
China

The RSH-800 Rotary Sensor Head is designed for continuous deposition in demanding processes, ensuring precise thickness monitoring and uninterrupted production.

Specification Snapshot
Crystal Size
14mm (0.550in) diameter
Installation Aperture
50.8mm (2.0in) diameter
Overall Length
See drawing inside
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Overview

The RSH-800 Rotary Sensor Head is designed for continuous deposition in demanding processes, ensuring precise thickness monitoring and uninterrupted production.

Specifications

ParameterValue
Number of CrystalsSix
Crystal Size14mm (0.550in) diameter
Installation Aperture50.8mm (2.0in) diameter
Overall LengthSee drawing inside
Power Requirement24V(dc) Solenoid valve 21.6-26.4V(dc), 40mA; 115V(ac) Solenoid valve 90-132V(ac), 36/32mA rms (50/60Hz)
Crystal Switching MethodAir actuated @55psi (4kg/cm²) regulated
Cooling MethodWater cooled @5L/min at 2kg/cm² (28psi) (Do not allow to freeze)
Air and Water ConnectionsOne 6mm (0.25in) quick connect for air, two 1/8in compression fittings for water
Maximum Bakeout Temperature Without Water130°C
Operating Temperature300°C max with water cooling and stainless steel head cover
Weight3.8kg (8.5lb), varies with overall length
Materials304 stainless steel, PEEK, beryllium nickel

Applications

1. Thin film deposition 2. Multi-layer coatings 3. Harsh environments with high temperatures

Key Features

1. Advanced six-crystal technology 2. Water-cooled durability 3. Easy on-site maintenance 4. High-temperature resistance up to 300°C 5. Optimized system performance

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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