RSH-800 Rotary Sensor Head
The RSH-800 Rotary Sensor Head is designed for continuous deposition in demanding processes, ensuring precise thickness monitoring and uninterrupted production.
Specification Snapshot
Crystal Size
14mm (0.550in) diameter
Installation Aperture
50.8mm (2.0in) diameter
Overall Length
See drawing inside
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Overview
The RSH-800 Rotary Sensor Head is designed for continuous deposition in demanding processes, ensuring precise thickness monitoring and uninterrupted production.
Specifications
| Parameter | Value |
|---|---|
| Number of Crystals | Six |
| Crystal Size | 14mm (0.550in) diameter |
| Installation Aperture | 50.8mm (2.0in) diameter |
| Overall Length | See drawing inside |
| Power Requirement | 24V(dc) Solenoid valve 21.6-26.4V(dc), 40mA; 115V(ac) Solenoid valve 90-132V(ac), 36/32mA rms (50/60Hz) |
| Crystal Switching Method | Air actuated @55psi (4kg/cm²) regulated |
| Cooling Method | Water cooled @5L/min at 2kg/cm² (28psi) (Do not allow to freeze) |
| Air and Water Connections | One 6mm (0.25in) quick connect for air, two 1/8in compression fittings for water |
| Maximum Bakeout Temperature Without Water | 130°C |
| Operating Temperature | 300°C max with water cooling and stainless steel head cover |
| Weight | 3.8kg (8.5lb), varies with overall length |
| Materials | 304 stainless steel, PEEK, beryllium nickel |
Applications
1. Thin film deposition 2. Multi-layer coatings 3. Harsh environments with high temperatures
Key Features
1. Advanced six-crystal technology 2. Water-cooled durability 3. Easy on-site maintenance 4. High-temperature resistance up to 300°C 5. Optimized system performance
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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