Vacuum Wafer Handling Robot
This vacuum wafer handling robot is designed for precise and efficient wafer transportation in vacuum environments, ensuring high accuracy and reliability.
Save to Favorites
Overview
Specifications
| Parameter | Value |
|---|---|
| Pressure Range | 大气压~10^-6Pa |
| Wafer Size | 200mm/300mm |
| Number of Wafer Transported | 1片/2片 |
| Maximum Reach Distance | 1050mm |
| Rotation Angle | ±210° |
| Lifting Stroke | 50mm |
| Minimum Rotation Diameter | 944mm 根据安装手臂 |
| Transportable Weight (Including Arm) | 1kg |
| Operation Speed - Extension | Max 2.5sec/行程 |
| Operation Speed - Rotation | Max 3.0sec/180° |
| Operation Speed - Lifting | Max 1.5sec/20mm |
| Repeat Positioning Accuracy - Extension | ±0.1mm |
| Repeat Positioning Accuracy - Rotation | ±0.2mm |
| Repeat Positioning Accuracy - Lifting | ±0.2mm |
| Teaching Pendant | 附带 |
| Controller | 另置 |
Applications
Key Features
Datasheet
Supplier Information
Related Products
-
48V Hermes
Automation and Control
Slamtec
: SLAMWARETM positioning navigation : 465×545mm : 357mm
-
Apollo2.0
Automation and Control
Slamtec
: SLAM positioning navigation : 520mm : 270mm
-
Athena2.0
Automation and Control
Slamtec
: SLAMWARETM positioning navigation : 429×460mm : 237mm
-
Hermes
Automation and Control
Slamtec
: SLAMWARETM positioning navigation : 465×545mm : 276mm
-
Phoebus P350
Automation and Control
Slamtec
: 780×506×270 : ≤105kg : 300
Related Articles
Electro-optic deflectors (EODs) are optical devices used to steer or deflect light beams by applying an electric field to a specialized optical crystal. Unlike mechanical beam steering systems that rely on moving mirrors, electro-optic deflectors enable high-speed, non-mechanical beam control with exceptional precision and responsiveness. They are widely used in laser scanning, optical communications, microscopy, laser printing, spectroscopy, and scientific research, where rapid and accurate laser beam positioning is essential.
An infrared transmitter (IR transmitter) is a basic electronic component that sends invisible infrared light signals for short-range wireless control. It is widely used in daily electronics, smart home devices, and industrial equipment due to its low cost, low power consumption, and stable performance.
Shanghai Connet Laser Technology Co., Ltd. focuses on technological innovation, delivering cutting-edge photonic products & solutions for industrial lasers, LiDAR, fiber optic sensing, coherent telecom, cold atom physics and precision spectroscopy research & mass manufacturing.
Wuhan Optical Valley Interlink Technology Co., Ltd. was founded in 2013 by a technical team from Huazhong University of Science and Technology.
Loading...
Name
Phone
Organization
Use Case
Database Platform