RF Power Supply

RF Power Supply

Supplier
UlvacShanghai
Part Number
RF Power Supply
Category
Automation and Control
Origin
China

The RF Power Supply series offers high-performance solutions for various industrial and scientific applications, providing reliable and efficient power delivery.

Specification Snapshot
Oscillation Frequency RFS-1305N
13.56MHz
Input Power MBX-1305
30~500W
Input Power MBX-1310
30~1000W
Input Power MBX-1330
30~3000W
Input Power MBX-1350
50~5000W
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Overview

The RF Power Supply series offers high-performance solutions for various industrial and scientific applications, providing reliable and efficient power delivery.

Specifications

ParameterValue
Input Rated Voltage RFS-1305N单相的AC200 to 220V
Input Capacity RFS-1305N1.2kVA或更低
Oscillation Frequency RFS-1305N13.56MHz
Maximum Rated Power RFS-1305N500W (50Ω负载下)
Output Connection RFS-1305NN型
Cooling Method RFS-1305N强制风冷,None需冷却水
Dimensions (WxDxH) Excluding Protrusions RFS-1305N240mmx495mmx150mm
Weight RFS-1305N约11kg
Regulatory Compliance RFS-1305NCE, KC, SEMI F47, SEMI S2, RoHS
Input Rated Voltage RFS-1310N单相的AC200 to 220V
Input Capacity RFS-1310N1.8kVA或更低
Oscillation Frequency RFS-1310N13.56MHz
Maximum Rated Power RFS-1310N1000W (50Ω负载下)
Output Connection RFS-1310NN型
Cooling Method RFS-1310N强制风冷,None需冷却水
Dimensions (WxDxH) Excluding Protrusions RFS-1310N240mmx495mmx150mm
Weight RFS-1310N约11kg
Regulatory Compliance RFS-1310NCE, KC, SEMI F47, SEMI S2, RoHS
Input Rated Voltage RFS-1330N三相的AC200 to 220V
Input Capacity RFS-1330N5kVA或更低
Oscillation Frequency RFS-1330N13.56MHz
Maximum Rated Power RFS-1330N3000W (50Ω负载下)
Output Connection RFS-1330NHN型
Cooling Method RFS-1330N强制风冷+水冷式,流量4L/min
Dimensions (WxDxH) Excluding Protrusions RFS-1330N480mmx500mmx150mm
Weight RFS-1330N约23kg
Regulatory Compliance RFS-1330NCE, KC, SEMI F47, SEMI S2, RoHS
Input Rated Voltage RFS-1350N三相的AC200 to 220V
Input Capacity RFS-1350N8kVA或更低
Oscillation Frequency RFS-1350N13.56MHz
Maximum Rated Power RFS-1350N5000W (50Ω负载下)
Output Connection RFS-1350NDIN 7/16
Cooling Method RFS-1350N强制风冷+水冷式,流量6L/min
Dimensions (WxDxH) Excluding Protrusions RFS-1350N480mmx500mmx150mm
Weight RFS-1350N约23kg
Regulatory Compliance RFS-1350NCE, KC, SEMI F47, SEMI S2, RoHS
Matching Frame Format MBX-1305MBX-1305
Input Power MBX-130530~500W
Permissible Output Current MBX-130530Arms
Permissible Output Voltage MBX-13052.5kVpp
Cooling Method MBX-1305强制风冷
Dimensions (WxDxH) Excluding Protrusions MBX-1305375mmx250mmx120mm
Weight MBX-1305约8kg
Regulatory Compliance MBX-1305CE, KC, SEMI F47, SEMI S2, RoHS
Matching Frame Format MBX-1310MBX-1310
Input Power MBX-131030~1000W
Permissible Output Current MBX-131030Arms
Permissible Output Voltage MBX-13102.5kVpp
Cooling Method MBX-1310强制风冷
Dimensions (WxDxH) Excluding Protrusions MBX-1310375mmx250mmx120mm
Weight MBX-1310约8kg
Regulatory Compliance MBX-1310CE, KC, SEMI F47, SEMI S2, RoHS
Matching Frame Format MBX-1330MBX-1330
Input Power MBX-133030~3000W
Permissible Output Current MBX-133080Arms
Permissible Output Voltage MBX-13305kVpp
Cooling Method MBX-1330水冷(2L/min)
Dimensions (WxDxH) Excluding Protrusions MBX-1330375mmx250mmx170mm
Weight MBX-1330约10kg
Regulatory Compliance MBX-1330CE, KC, SEMI F47, SEMI S2, RoHS
Matching Frame Format MBX-1350MBX-1350
Input Power MBX-135050~5000W
Permissible Output Current MBX-1350120Arms
Permissible Output Voltage MBX-135010kVpp
Cooling Method MBX-1350水冷(2L/min)
Dimensions (WxDxH) Excluding Protrusions MBX-1350450mmx500mmx248mm
Weight MBX-1350约21kg
Regulatory Compliance MBX-1350CE, KC, SEMI F47, SEMI S2, RoHS

Applications

1. Semiconductor manufacturing 2. Plasma generation 3. Industrial heating 4. Scientific research

Key Features

1. High power output 2. Multiple cooling methods 3. Compliance with international standards 4. Compact and lightweight design

Datasheet

Product Datasheet
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Supplier Information

Ul
UlvacShanghai
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<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>

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