RF Power Supply
The RF Power Supply series offers high-performance solutions for various industrial and scientific applications, providing reliable and efficient power delivery.
Specification Snapshot
Oscillation Frequency RFS-1305N
13.56MHz
Input Power MBX-1305
30~500W
Input Power MBX-1310
30~1000W
Input Power MBX-1330
30~3000W
Input Power MBX-1350
50~5000W
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Overview
The RF Power Supply series offers high-performance solutions for various industrial and scientific applications, providing reliable and efficient power delivery.
Specifications
| Parameter | Value |
|---|---|
| Input Rated Voltage RFS-1305N | 单相的AC200 to 220V |
| Input Capacity RFS-1305N | 1.2kVA或更低 |
| Oscillation Frequency RFS-1305N | 13.56MHz |
| Maximum Rated Power RFS-1305N | 500W (50Ω负载下) |
| Output Connection RFS-1305N | N型 |
| Cooling Method RFS-1305N | 强制风冷,None需冷却水 |
| Dimensions (WxDxH) Excluding Protrusions RFS-1305N | 240mmx495mmx150mm |
| Weight RFS-1305N | 约11kg |
| Regulatory Compliance RFS-1305N | CE, KC, SEMI F47, SEMI S2, RoHS |
| Input Rated Voltage RFS-1310N | 单相的AC200 to 220V |
| Input Capacity RFS-1310N | 1.8kVA或更低 |
| Oscillation Frequency RFS-1310N | 13.56MHz |
| Maximum Rated Power RFS-1310N | 1000W (50Ω负载下) |
| Output Connection RFS-1310N | N型 |
| Cooling Method RFS-1310N | 强制风冷,None需冷却水 |
| Dimensions (WxDxH) Excluding Protrusions RFS-1310N | 240mmx495mmx150mm |
| Weight RFS-1310N | 约11kg |
| Regulatory Compliance RFS-1310N | CE, KC, SEMI F47, SEMI S2, RoHS |
| Input Rated Voltage RFS-1330N | 三相的AC200 to 220V |
| Input Capacity RFS-1330N | 5kVA或更低 |
| Oscillation Frequency RFS-1330N | 13.56MHz |
| Maximum Rated Power RFS-1330N | 3000W (50Ω负载下) |
| Output Connection RFS-1330N | HN型 |
| Cooling Method RFS-1330N | 强制风冷+水冷式,流量4L/min |
| Dimensions (WxDxH) Excluding Protrusions RFS-1330N | 480mmx500mmx150mm |
| Weight RFS-1330N | 约23kg |
| Regulatory Compliance RFS-1330N | CE, KC, SEMI F47, SEMI S2, RoHS |
| Input Rated Voltage RFS-1350N | 三相的AC200 to 220V |
| Input Capacity RFS-1350N | 8kVA或更低 |
| Oscillation Frequency RFS-1350N | 13.56MHz |
| Maximum Rated Power RFS-1350N | 5000W (50Ω负载下) |
| Output Connection RFS-1350N | DIN 7/16 |
| Cooling Method RFS-1350N | 强制风冷+水冷式,流量6L/min |
| Dimensions (WxDxH) Excluding Protrusions RFS-1350N | 480mmx500mmx150mm |
| Weight RFS-1350N | 约23kg |
| Regulatory Compliance RFS-1350N | CE, KC, SEMI F47, SEMI S2, RoHS |
| Matching Frame Format MBX-1305 | MBX-1305 |
| Input Power MBX-1305 | 30~500W |
| Permissible Output Current MBX-1305 | 30Arms |
| Permissible Output Voltage MBX-1305 | 2.5kVpp |
| Cooling Method MBX-1305 | 强制风冷 |
| Dimensions (WxDxH) Excluding Protrusions MBX-1305 | 375mmx250mmx120mm |
| Weight MBX-1305 | 约8kg |
| Regulatory Compliance MBX-1305 | CE, KC, SEMI F47, SEMI S2, RoHS |
| Matching Frame Format MBX-1310 | MBX-1310 |
| Input Power MBX-1310 | 30~1000W |
| Permissible Output Current MBX-1310 | 30Arms |
| Permissible Output Voltage MBX-1310 | 2.5kVpp |
| Cooling Method MBX-1310 | 强制风冷 |
| Dimensions (WxDxH) Excluding Protrusions MBX-1310 | 375mmx250mmx120mm |
| Weight MBX-1310 | 约8kg |
| Regulatory Compliance MBX-1310 | CE, KC, SEMI F47, SEMI S2, RoHS |
| Matching Frame Format MBX-1330 | MBX-1330 |
| Input Power MBX-1330 | 30~3000W |
| Permissible Output Current MBX-1330 | 80Arms |
| Permissible Output Voltage MBX-1330 | 5kVpp |
| Cooling Method MBX-1330 | 水冷(2L/min) |
| Dimensions (WxDxH) Excluding Protrusions MBX-1330 | 375mmx250mmx170mm |
| Weight MBX-1330 | 约10kg |
| Regulatory Compliance MBX-1330 | CE, KC, SEMI F47, SEMI S2, RoHS |
| Matching Frame Format MBX-1350 | MBX-1350 |
| Input Power MBX-1350 | 50~5000W |
| Permissible Output Current MBX-1350 | 120Arms |
| Permissible Output Voltage MBX-1350 | 10kVpp |
| Cooling Method MBX-1350 | 水冷(2L/min) |
| Dimensions (WxDxH) Excluding Protrusions MBX-1350 | 450mmx500mmx248mm |
| Weight MBX-1350 | 约21kg |
| Regulatory Compliance MBX-1350 | CE, KC, SEMI F47, SEMI S2, RoHS |
Applications
1. Semiconductor manufacturing 2. Plasma generation 3. Industrial heating 4. Scientific research
Key Features
1. High power output 2. Multiple cooling methods 3. Compliance with international standards 4. Compact and lightweight design
Datasheet
Product Datasheet
PDF
Supplier Information
<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>
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