EGN-206M/EGN-406M Electron Beam Evaporator
The EGN-206M and EGN-406M are advanced electron beam evaporators designed for high-precision thin-film deposition applications. These systems offer excellent performance and reliability for various industrial and research purposes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Model | EGN-206M, EGN-406M |
| Electron Beam Deflection Angle | 270° |
| Number of Crucibles | 6 |
| Crucible Capacity EGN-206M | 20cc |
| Crucible Capacity EGN-406M | 40cc |
| Crucible Dimensions (Top×Bottom×Depth) EGN-206M | Φ42×Φ32×19(mm) |
| Crucible Dimensions (Top×Bottom×Depth) EGN-406M | Φ50×Φ41×25(mm) |
| Cooling Water Flow Rate (Furnace Edge) | 10L/min or more |
| Cooling Water Flow Rate (Others) | 2L/min or more |
| Dimensions (W×D×H) Excluding Protrusions | 214×343×144(mm) |
| Weight | 28kg or less |
| Deposition Rate | 1.6μm/min (Aluminum/8kW/40cc crucible/250H above furnace center) |
| Maximum Acceleration Voltage | -10kV |
| Maximum Emission Current EGN-206M | 0.8A |
| Maximum Emission Current EGN-406M | 1.0A |
| Applicable Power Supply | HPS-1000N-100/HPS-1000N-200 |
Applications
Key Features
Datasheet
Supplier Information
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