SH2 Series Vacuum Gauge

SH2 Series Vacuum Gauge

Supplier
UlvacShanghai
Part Number
SH2 Series Vacuum Gauge
Category
Other
Origin
China

The SH2 Series Vacuum Gauge is a high-precision vacuum measurement device designed for various industrial and scientific applications. It offers reliable and accurate pressure readings across a wide range of vacuum levels.

Specification Snapshot
Power Consumption
≤19W (power-on 156W)
Dimensions WxDxH
144mm×75mm×62mm (control unit)
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Overview

The SH2 Series Vacuum Gauge is a high-precision vacuum measurement device designed for various industrial and scientific applications. It offers reliable and accurate pressure readings across a wide range of vacuum levels.

Specifications

ParameterValue
ModelSH2-1, SH2-2
SpecificationStandard specification (SH2-1), Serial communication specification (SH2-2)
Compatible Ionization Vacuum Gauge SensorM-34(NW16), M-35(NW25), M-36(UFC070)
Connectable SensorsSPU (Pirani vacuum gauge): 1 (optional), SAU (large vacuum gauge): 1 (optional)
Sampling Time70ms (average of 4 readings)
Output VoltageDC 0~10V, LOG output 0.75V/1 digit
Pressure Conversion FormulaV=7.25+0.75×(LogP-2), P=10^((V-7.25)/0.75+2)
Update Time50ms
Control Input SignalFIL ON/OFF, FIL 1/2, DEGAS ON/OFF
Control Output SignalSensor report, filament power monitoring, rated specification: 24Vmax, 50mAmax, other voltage 1V
Serial Communication SpecificationRS232C/RS-485
LED DisplaySET1: 1 LED, SET2: 2 LEDs, SET3: 3 LEDs
Filament Current1mA (1×10^-3Pa or less), 10μA
DEGASElectron impact ionization method, 1mA, 330V
Sensor Pressure Resistance2×10^5Pa (absolute pressure)
Sensor Internal Volume34cm³ (M-34)
Operating Temperature Range10~50°C
Operating humidity range15~80% (non-condensing)
Storage Temperature-20~65°C (non-operating, non-condensing)
IP Protection LevelIP30
Power Supply VoltageDC 20~28V (ripple noise ≤1%)
Power Consumption≤19W (power-on 156W)
Input/Output ConnectionD-sub15 Pin (M2.6 screws)
WeightControl unit: approx. 530g, B-A sensor (M-34): 63g
Dimensions WxDxH144mm×75mm×62mm (control unit)
Applicable SpecificationsCE
Composite Ionization Gauge SensorM-34(NW16), M-35(NW25), M-36(UFC070)
Pirani Vacuum GaugeWP-16(NW16), Filament: Pt, Others: BS/Ni, Electrodes, Ni, Solder
Large Vacuum GaugeSAU(NW16), Material: SUS316L
CableSPU: 0.5m, SAU: 0.5m
Display Unit1CH: Model ISG1 (DC24V power supply), 4CH: Model IM1R1 (DC24V power supply), Model IM2R1 (AC100V power supply)
Display Unit Cable2m, 5m, 10m, 15m, 20m
ModeSH2-1/SH2-2 (Single mode), SH2-1/SH2-2+SPU (Combined mode), SH2-1/SH2-2+SPU+SAU (Combined mode)
Measurement Pressure Range5×10^-8~1×10^1Pa (Single mode), 5×10^-8~1×10^4Pa (SH2-1/SH2-2+SPU), 5×10^-8~1×10^5Pa (SH2-1/SH2-2+SPU+SAU)
Measurement Accuracy5×10^-8~1×10^1Pa: ±15%, 1.0×10^3~3.0×10^3Pa: ±30%, 3.0×10^3~1.0×10^4Pa: No accuracy guarantee, 1.0×10^4~1.0×10^5Pa: ±3% F.S. (3×10^3Pa, at 25°C)
Repeatability1×10^-6~1×10^-1Pa: ±2%

Applications

1. Industrial vacuum systems 2. Scientific research laboratories 3. Semiconductor manufacturing 4. Vacuum coating processes

Key Features

1. High precision vacuum measurement 2. Wide pressure measurement range 3. Fast response time 4. Multiple sensor compatibility 5. LED display for easy monitoring

Datasheet

Product Datasheet
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Supplier Information

Ul
UlvacShanghai
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<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>

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