SH2 Series Vacuum Gauge
The SH2 Series Vacuum Gauge is a high-precision vacuum measurement device designed for various industrial and scientific applications. It offers reliable and accurate pressure readings across a wide range of vacuum levels.
Specification Snapshot
Power Consumption
≤19W (power-on 156W)
Dimensions WxDxH
144mm×75mm×62mm (control unit)
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Overview
The SH2 Series Vacuum Gauge is a high-precision vacuum measurement device designed for various industrial and scientific applications. It offers reliable and accurate pressure readings across a wide range of vacuum levels.
Specifications
| Parameter | Value |
|---|---|
| Model | SH2-1, SH2-2 |
| Specification | Standard specification (SH2-1), Serial communication specification (SH2-2) |
| Compatible Ionization Vacuum Gauge Sensor | M-34(NW16), M-35(NW25), M-36(UFC070) |
| Connectable Sensors | SPU (Pirani vacuum gauge): 1 (optional), SAU (large vacuum gauge): 1 (optional) |
| Sampling Time | 70ms (average of 4 readings) |
| Output Voltage | DC 0~10V, LOG output 0.75V/1 digit |
| Pressure Conversion Formula | V=7.25+0.75×(LogP-2), P=10^((V-7.25)/0.75+2) |
| Update Time | 50ms |
| Control Input Signal | FIL ON/OFF, FIL 1/2, DEGAS ON/OFF |
| Control Output Signal | Sensor report, filament power monitoring, rated specification: 24Vmax, 50mAmax, other voltage 1V |
| Serial Communication Specification | RS232C/RS-485 |
| LED Display | SET1: 1 LED, SET2: 2 LEDs, SET3: 3 LEDs |
| Filament Current | 1mA (1×10^-3Pa or less), 10μA |
| DEGAS | Electron impact ionization method, 1mA, 330V |
| Sensor Pressure Resistance | 2×10^5Pa (absolute pressure) |
| Sensor Internal Volume | 34cm³ (M-34) |
| Operating Temperature Range | 10~50°C |
| Operating humidity range | 15~80% (non-condensing) |
| Storage Temperature | -20~65°C (non-operating, non-condensing) |
| IP Protection Level | IP30 |
| Power Supply Voltage | DC 20~28V (ripple noise ≤1%) |
| Power Consumption | ≤19W (power-on 156W) |
| Input/Output Connection | D-sub15 Pin (M2.6 screws) |
| Weight | Control unit: approx. 530g, B-A sensor (M-34): 63g |
| Dimensions WxDxH | 144mm×75mm×62mm (control unit) |
| Applicable Specifications | CE |
| Composite Ionization Gauge Sensor | M-34(NW16), M-35(NW25), M-36(UFC070) |
| Pirani Vacuum Gauge | WP-16(NW16), Filament: Pt, Others: BS/Ni, Electrodes, Ni, Solder |
| Large Vacuum Gauge | SAU(NW16), Material: SUS316L |
| Cable | SPU: 0.5m, SAU: 0.5m |
| Display Unit | 1CH: Model ISG1 (DC24V power supply), 4CH: Model IM1R1 (DC24V power supply), Model IM2R1 (AC100V power supply) |
| Display Unit Cable | 2m, 5m, 10m, 15m, 20m |
| Mode | SH2-1/SH2-2 (Single mode), SH2-1/SH2-2+SPU (Combined mode), SH2-1/SH2-2+SPU+SAU (Combined mode) |
| Measurement Pressure Range | 5×10^-8~1×10^1Pa (Single mode), 5×10^-8~1×10^4Pa (SH2-1/SH2-2+SPU), 5×10^-8~1×10^5Pa (SH2-1/SH2-2+SPU+SAU) |
| Measurement Accuracy | 5×10^-8~1×10^1Pa: ±15%, 1.0×10^3~3.0×10^3Pa: ±30%, 3.0×10^3~1.0×10^4Pa: No accuracy guarantee, 1.0×10^4~1.0×10^5Pa: ±3% F.S. (3×10^3Pa, at 25°C) |
| Repeatability | 1×10^-6~1×10^-1Pa: ±2% |
Applications
1. Industrial vacuum systems 2. Scientific research laboratories 3. Semiconductor manufacturing 4. Vacuum coating processes
Key Features
1. High precision vacuum measurement 2. Wide pressure measurement range 3. Fast response time 4. Multiple sensor compatibility 5. LED display for easy monitoring
Datasheet
Product Datasheet
PDF
Supplier Information
<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>
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