X-BOT-120
X-BOT-120 is a compact six-degree-of-freedom motion platform with a height of 70mm. It is designed for precise positioning and adjustment of components, offering nanometer-level resolution. Utilizing an innovative nanopositioner arrangement, it achieves a relatively large travel range despite its compact size. The platform eliminates the need for traditional zero-point requirements and can be paired with a rotary table (PR-32L) to achieve 360° rotation around the Z-axis, with an integrated load-bearing function underneath. It is available in high vacuum (HV), ultra-high vacuum (UHV), and non-magnetic versions, with customizable travel ranges.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel Range Tx,Ty(mm) | ±6mm |
| Travel Range Tz(mm) | +3.5/-6 |
| Travel Range Rx(deg) | +7/-9 |
| Travel Range Ry(deg) | ±9 |
| Travel Range Rz(deg) | ±6 |
| Encoder | 绝对式 |
| Resolution Tx,Ty,Tz(nm) | 25nm |
| Resolution Rx,Ry,Rz(μdeg) | 100 |
| Repeatability Tx,Ty,Tz(nm) | 100nm |
| Repeatability Rx,Ry,Rz(μdeg) | 200 |
| Bidirectional Repeatability(nm) | 200nm |
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