TRI-BOT-50
TRI-BOT-50 is a compact Tip Tilt Z-axis motion platform with dimensions of 51×51mm and a height of 47mm. Its micro tripod design enables precise angular positioning in three degrees of freedom, achieving sub-micron resolution.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel Range Ry(deg) | ±10 |
| Travel Range Rz(deg) | ±360° (Optional PR-20 rotation stage) |
| Encoder | Digital incremental (RS-422) |
| Resolution Tz(nm) | 40nm |
| Resolution Rx,Ry(μdeg) | 100 |
| Repeatability Tz(nm) | ±200nm |
| Repeatability Rx,Ry(μdeg) | 200 |
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Key Features
Datasheet
Supplier Information
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