NS-XY5Z5-01
The NS-XY5Z5-01 is a precision motion control device designed for high-accuracy applications. It features a compact design and advanced capacitive sensor technology for precise Z-axis control.
Specification Snapshot
Linearity (%)
0.1
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Overview
The NS-XY5Z5-01 is a precision motion control device designed for high-accuracy applications. It features a compact design and advanced capacitive sensor technology for precise Z-axis control.
Specifications
| Parameter | Value |
|---|---|
| Motion Axis | X/Y, Z |
| Sensor Type | - (X/Y), Capacitive (Z) |
| Travel Range (μm) X/Y | 5/5 (open loop) |
| Travel Range (μm) Z | 5 (closed loop) |
| Closed Loop Resolution (nm) | 0.1 |
| Linearity (%) | 0.1 |
| No-load Resonant Frequency (Hz) X/Y | 7000/7000 |
| No-load Resonant Frequency (Hz) Z | 7000 |
| Port | D-sub15 |
| Material | Aluminum alloy |
| Maximum Load (kg) | 0.3 |
| Self Weight (kg) | 0.02 |
| Dimensions (mm) | 20x20x20 |
| Compatible Controller | SC100-2B/SC300-3/SC400-3 |
Applications
1. Precision positioning in optical systems 2. Semiconductor manufacturing 3. Scientific research and laboratory applications
Key Features
1. High precision motion control 2. Compact design 3. Durable aluminum alloy construction 4. High resonant frequency for stability
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Sanying MotionControl Instruments Ltd., based in Tianjin, is a professional manufacturer of ultra-precision motion control technology and products. The company provides nano positioning stages, piezo actuators, nano capacitive sensors, high-precision air bearing stages, and microscope stages for semiconductor, scientific research, biomedical and optoelectronic applications, with over 100 patents and national standard contributions.</p>
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