NS-XY25Z20-01
The NS-XY25Z20-01 is a high-precision capacitive sensor stage designed for XYZ axis movement, offering excellent resolution and linearity for precise positioning applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Motion Axis | X/Y/Z |
| Sensor Type | Capacitive |
| Closed-loop Travel (μm) | 25/25/20 |
| Closed-loop Resolution (nm) | 0.1/0.1/0.1 |
| Linearity (%) | 0.05/0.05/0.05 |
| No-load Resonant Frequency (Hz) | 1400/1400/1000 |
| Port | D-sub15 |
| Material | Aluminum alloy |
| Maximum Load (kg) | 1 |
| Self-weight (kg) | 0.3 |
| Dimensions (mm) | 69×69×37.5 |
| Compatible Controller | SC100-A/SC300-3/SC400-3 |
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Key Features
Datasheet
Supplier Information
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