NS-XY200Z100-01
The NS-XY200Z100-01 is a high-precision capacitive sensor-based motion platform designed for XYZ axis movement. It offers excellent resolution, linearity, and vibration frequency performance, making it ideal for applications requiring precise positioning and stability.
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Overview
The NS-XY200Z100-01 is a high-precision capacitive sensor-based motion platform designed for XYZ axis movement. It offers excellent resolution, linearity, and vibration frequency performance, making it ideal for applications requiring precise positioning and stability.
Specifications
| Parameter | Value |
|---|---|
| Motion Axis | X/Y/Z |
| Sensor Type | Capacitive |
| Closed-loop Travel (μm) | 200/200/100 |
| Closed-loop Resolution (nm) | 0.8/0.8/0.5 |
| Linearity (%) | 0.02/0.02/0.04 |
| No-load Resonant Frequency (Hz) | 450/450/500 |
| Port | D-sub15 |
| Material | Aluminum alloy |
| Maximum Load (kg) | 5 |
| Weight (kg) | 0.9 |
| Dimensions (mm) | 140×140×39.3 |
| Compatible Controller | SC100-A/SC300-3/SC400-3 |
Applications
1. Precision positioning in optical systems 2. Semiconductor manufacturing 3. Scientific research and laboratory experiments
Key Features
1. High precision capacitive sensor 2. Compact and lightweight design 3. High load capacity 4. Excellent linearity and resolution
Datasheet
Product Datasheet
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Supplier Information
<p>Sanying MotionControl Instruments Ltd., based in Tianjin, is a professional manufacturer of ultra-precision motion control technology and products. The company provides nano positioning stages, piezo actuators, nano capacitive sensors, high-precision air bearing stages, and microscope stages for semiconductor, scientific research, biomedical and optoelectronic applications, with over 100 patents and national standard contributions.</p>
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