NNS-Z200RXY2-01
The NNS-Z200RXY2-01 is a precision motion control platform designed for high-accuracy applications. It features capacitive sensors and offers excellent linearity and vibration frequency performance.
Specification Snapshot
Linearity (%)
0.05
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Overview
The NNS-Z200RXY2-01 is a precision motion control platform designed for high-accuracy applications. It features capacitive sensors and offers excellent linearity and vibration frequency performance.
Specifications
| Parameter | Value |
|---|---|
| Motion Axis | Z |
| Sensor Type | Capacitive |
| Closed-loop Travel (μm) | 200μm |
| Closed-loop Resolution (nm) | 1nm |
| No-load Resonant Frequency (Hz) | 400 |
| Resonant Frequency with Load (0.5kg) (Hz) | 260 |
| Resonant Frequency with Load (2.5kg) (Hz) | 140 |
| Linearity (%) | 0.05 |
| Port | D-sub15 |
| Material | Aluminum alloy |
| Weight (kg) | 1.4 |
| Dimensions (mm) | 150×150×30 |
| Compatible Controller | SC500-4 |
| Capacitive | ±1mrad/±1mrad |
| Resolution | 0.1μrad/0.1μrad |
| Resonant Frequency with Load (0.5kg) Rx/Ry (Hz) | 230/230 |
| Resonant Frequency with Load (2.5kg) Rx/Ry (Hz) | 115/115 |
| Linearity Rx/Ry (%) | 0.05/0.05 |
Applications
1. Precision measurement 2. Optical experiments 3. Semiconductor testing
Key Features
1. High precision motion control 2. Compact design 3. Wide compatibility with controllers
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Sanying MotionControl Instruments Ltd., based in Tianjin, is a professional manufacturer of ultra-precision motion control technology and products. The company provides nano positioning stages, piezo actuators, nano capacitive sensors, high-precision air bearing stages, and microscope stages for semiconductor, scientific research, biomedical and optoelectronic applications, with over 100 patents and national standard contributions.</p>
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