Precision Motion Control Platform
This precision motion control platform is designed for high-accuracy positioning and rotation applications, featuring multi-axis control and robust load capacity.
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Overview
This precision motion control platform is designed for high-accuracy positioning and rotation applications, featuring multi-axis control and robust load capacity.
Specifications
| Parameter | Value |
|---|---|
| Travel Range Z-axis | 5mm |
| Step Angle Z-axis | 1.8° |
| Resolution (8 Subdivision) Z-axis | 0.08μm |
| Grating Resolution Z-axis | 0.1μm |
| Central Load Z-axis | 5kg |
| Travel Range Rx-axis | ±1° |
| Step Angle Rx-axis | 1.8° |
| Resolution (8 Subdivision) Rx-axis | 0.8μrad |
| Grating Resolution Rx-axis | 0.1μm |
| Central Load Rx-axis | 5kg |
| Travel Range Ry-axis | ±1° |
| Step Angle Ry-axis | 1.8° |
| Resolution (8 Subdivision) Ry-axis | 0.8μrad |
| Grating Resolution Ry-axis | 0.1μm |
| Central Load Ry-axis | 5kg |
| Travel Range Rz-axis | ±1.5° |
| Step Angle Rz-axis | 1.8° |
| Resolution (8 Subdivision) Rz-axis | 1μrad |
| Grating Resolution Rz-axis | 0.1μm |
| Central Load Rz-axis | 5kg |
Applications
1. Precision optical alignment 2. Semiconductor manufacturing 3. Scientific research and testing
Key Features
1. High precision multi-axis control 2. Compact design with robust construction 3. Suitable for high-load applications
Datasheet
Product Datasheet
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Supplier Information
<p>Sanying MotionControl Instruments Ltd., based in Tianjin, is a professional manufacturer of ultra-precision motion control technology and products. The company provides nano positioning stages, piezo actuators, nano capacitive sensors, high-precision air bearing stages, and microscope stages for semiconductor, scientific research, biomedical and optoelectronic applications, with over 100 patents and national standard contributions.</p>
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