EVSP/G Series Precision Stage
The EVSP/G series precision stage is designed for high-accuracy positioning applications, featuring a compact structure and advanced optical encoder technology.
Specification Snapshot
Resolution (8 Subdivisions) EVSP15G
0.1μm (Optical Scale)
Resolution (8 Subdivisions) EVSP30G
0.1μm (Optical Scale)
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Overview
The EVSP/G series precision stage is designed for high-accuracy positioning applications, featuring a compact structure and advanced optical encoder technology.
Specifications
| Parameter | Value |
|---|---|
| Travel Range EVSP15 | 15mm |
| Travel Range EVSP15G | 15mm |
| Travel Range EVSP30 | 30mm |
| Travel Range EVSP30G | 30mm |
| Lead of Screw EVSP15 | 0.635mm |
| Lead of Screw EVSP15G | 0.635mm |
| Lead of Screw EVSP30 | 0.635mm |
| Lead of Screw EVSP30G | 0.635mm |
| Main Material | Aluminum Alloy |
| Surface Treatment | Anodizing |
| Guide Rail | Crossed Roller Guide |
| Maximum Speed | 2mm/s |
| Resolution (8 Subdivisions) EVSP15 | 0.397μm |
| Resolution (8 Subdivisions) EVSP15G | 0.1μm (Optical Scale) |
| Resolution (8 Subdivisions) EVSP30 | 0.397μm |
| Resolution (8 Subdivisions) EVSP30G | 0.1μm (Optical Scale) |
| Repeatability EVSP15 | ±1μm |
| Repeatability EVSP15G | ±0.3μm |
| Repeatability EVSP30 | ±1μm |
| Repeatability EVSP30G | ±0.3μm |
| Drive Motor | 20-line stepper motor |
| Step Angle | 1.8° |
| Central Load | 1kg |
| Positioning Accuracy EVSP15 | -- |
| Positioning Accuracy EVSP15G | ±1μm |
| Positioning Accuracy EVSP30 | -- |
| Positioning Accuracy EVSP30G | ±1μm |
| Control Mode EVSP15 | Open Loop |
| Control Mode EVSP15G | Closed Loop |
| Control Mode EVSP30 | Open Loop |
| Control Mode EVSP30G | Closed Loop |
| Self Weight EVSP15 | 0.31kg |
| Self Weight EVSP15G | 0.33kg |
| Self Weight EVSP30 | 0.33kg |
| Self Weight EVSP30G | 0.57kg |
| Rated current | 0.24A |
Applications
1. High-precision positioning in optical systems 2. Semiconductor manufacturing 3. Laboratory research and testing
Key Features
1. Compact design for space-saving applications 2. High precision with optical encoder technology 3. Durable aluminum alloy construction with anodized surface treatment 4. Crossed roller guide for smooth and stable movement
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Sanying MotionControl Instruments Ltd., based in Tianjin, is a professional manufacturer of ultra-precision motion control technology and products. The company provides nano positioning stages, piezo actuators, nano capacitive sensors, high-precision air bearing stages, and microscope stages for semiconductor, scientific research, biomedical and optoelectronic applications, with over 100 patents and national standard contributions.</p>
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