ETSA系列直线电机Platform
The ETSA series linear motor stage is a high-precision motion platform designed for applications requiring precise positioning and smooth motion. It features a linear motor drive system and an optical feedback system, ensuring high accuracy and stability.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel Range ETSA-100 | 100mm |
| Travel Range ETSA-300 | 300mm |
| Travel Range ETSA-500 | 500mm |
| Drive Mode | 直线电机 |
| Motor Continuous/Peak Thrust | 100/400N |
| Feedback Method | 光栅Feedback系统 |
| Feedback System Resolution | 20nm |
| Maximum Speed | 700mm/s |
| Maximum Acceleration (No Load) | 1g |
| Maximum Load | 25kg |
| Positioning Accuracy | ±0.5μm |
| Repeatability | ±0.1μm |
| Straightness | ±0.5μm |
| Parallelism | ±0.5μm |
| Dynamic Flatness | ±1μm |
| Yaw | 3arcsec |
| Pitch | 5arcsec |
| Working Air Pressure | 0.6MPa |
Applications
Key Features
Datasheet
Supplier Information
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