ES-50PM Piezo Motor Stage
The ES-50PM piezo motor stage is a precision positioning device designed for high-accuracy applications. It features a compact design and advanced piezoelectric motor technology, ensuring reliable and precise movement.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel Range(mm) | 10 |
| Straightness/Flatness(μm) | ±4 |
| Pitch(μrad) | ±300 |
| Yaw(μrad) | ±300 |
| Weight(Open Loop)(g) | 160 |
| Weight(Closed Loop)(g) | 165 |
| Motor | Piezo Motor |
| Max Speed(mm/s) | >1(MMC-100), >5(MMC-110) |
| Encoder | None(Open Loop), Analog(1Vpp), Digital(RS-422) |
| Resolution, Typical(nm) | 10, 2 |
| Repeatability, Bidirectional(nm) | n/a, ±50 |
| Repeatability, Unidirectional(nm) | n/a, ±50 |
| Material | Aluminum body, steel guide rail (optional stainless steel, titanium materials) |
| Max Load Fx(N) | 5 |
| Max Load Fy(N) | 5 |
| Max Load Fz(N) | 10 |
| Max Load Mx(N·m) | 1 |
| Max Load My(N·m) | 1 |
| Max Load Mz(N·m) | 1 |
| Max Load kax(μrad/N·m) | - |
| Max Load kay(μrad/N·m) | - |
Applications
Key Features
Datasheet
Supplier Information
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