PPS-70LM Linear Motor Stage
The PPS-70LM linear motor stage is a high-precision motion platform designed for applications requiring accurate positioning and smooth operation.
Specification Snapshot
Resolution
5nm
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Overview
The PPS-70LM linear motor stage is a high-precision motion platform designed for applications requiring accurate positioning and smooth operation.
Specifications
| Parameter | Value |
|---|---|
| Travel Range 32mm | 32 |
| Travel Range 51mm | 51 |
| Travel Range 75mm | 75 |
| Travel Range 100mm | 100 |
| Straightness/Flatness 32mm | ±3μm |
| Straightness/Flatness 51mm | ±5μm |
| Straightness/Flatness 75mm | ±7μm |
| Straightness/Flatness 100mm | ±7μm |
| Weight (Closed Loop) 32mm | 175g |
| Weight (Closed Loop) 51mm | 250g |
| Weight (Closed Loop) 75mm | 330g |
| Weight (Closed Loop) 100mm | 400g |
| Motor | Linear Motor |
| Maximum Speed | 150 (Incremental Encoder), 300 (Absolute Encoder) mm/s |
| Encoder | Digital (RS-422), Absolute (BiSS C) |
| Resolution | 5nm |
| Repeatability (Bidirectional) | ±50nm |
| Repeatability (Unidirectional) | 50nm |
| Material | Aluminum body, steel guide (optional stainless steel or titanium) |
Applications
1. Semiconductor manufacturing 2. Precision measurement 3. Optical inspection 4. Scientific research
Key Features
1. High precision positioning 2. Compact design 3. Multiple travel ranges 4. Suitable for high vacuum environments
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Sanying MotionControl Instruments Ltd., based in Tianjin, is a professional manufacturer of ultra-precision motion control technology and products. The company provides nano positioning stages, piezo actuators, nano capacitive sensors, high-precision air bearing stages, and microscope stages for semiconductor, scientific research, biomedical and optoelectronic applications, with over 100 patents and national standard contributions.</p>
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