PPS-70LM Linear Motor Stage

PPS-70LM Linear Motor Stage

Supplier
Symc-tec
Part Number
PPS-70LM Linear Motor Stage
Category
Motors and Drives
Origin
China

The PPS-70LM linear motor stage is a high-precision motion platform designed for applications requiring accurate positioning and smooth operation.

Specification Snapshot
Resolution
5nm
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Overview

The PPS-70LM linear motor stage is a high-precision motion platform designed for applications requiring accurate positioning and smooth operation.

Specifications

ParameterValue
Travel Range 32mm32
Travel Range 51mm51
Travel Range 75mm75
Travel Range 100mm100
Straightness/Flatness 32mm±3μm
Straightness/Flatness 51mm±5μm
Straightness/Flatness 75mm±7μm
Straightness/Flatness 100mm±7μm
Weight (Closed Loop) 32mm175g
Weight (Closed Loop) 51mm250g
Weight (Closed Loop) 75mm330g
Weight (Closed Loop) 100mm400g
EncoderDigital (RS-422), Absolute (BiSS C)
Resolution5nm
Repeatability (Bidirectional)±50nm
Repeatability (Unidirectional)50nm

Applications

1. Semiconductor manufacturing 2. Precision measurement 3. Optical inspection 4. Scientific research

Key Features

1. High precision positioning 2. Compact design 3. Multiple travel ranges 4. Suitable for high vacuum environments

Datasheet

Product Datasheet
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Supplier Information

Sy
Symc-tec
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SYMC (Tianjin) Instrument Equipment Co., Ltd. is a professional manufacturer focusing on ultra-precision motion control technology and products. We are committed to providing innovative products and solutions for ultra-precision motion control technology for the manufacturing of high-end equipment and the research and development of scientific research instruments. Adhering to the purpose of "high-end innovation, lean manufacturing" and the goal of "building an international brand of China's high-end manufacturing", we provide key technologies and build a solid foundation for the upgrading of China's high-end manufacturing equipment industry, and realize the localization of core technology equipment. SYMC (Tianjin) Instrument Equipment Co., Ltd. has reached the international advanced level in nano motion control technology and owns complete independent intellectual property rights. The company's core technology integrates precision sensing, precision driving, precision machinery, precision control, precision measurement and precision integration, and the comprehensive indicators of products have reached the international advanced level. The company provides a series of products and complete solutions including high-precision nano positioning platforms, high-speed tip-tilt mirrors, piezoelectric actuators, nano capacitive displacement sensors, high-precision air bearing platforms, piezoelectric driven positioning platforms, micro positioning platforms, microscope stages and precision motion control integration.

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