Turbo Molecular Pump
A high-performance turbo molecular pump designed for advanced vacuum applications.
Specification Snapshot
Power Consumption
1.5kW
Flange Size
ISO 160
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Overview
A high-performance turbo molecular pump designed for advanced vacuum applications.
Specifications
| Parameter | Value |
|---|---|
| Rotation Speed | 90,000rpm |
| Pumping Speed | 1,200L/s |
| Compression Ratio | 10^8 |
| Power Consumption | 1.5kW |
| Weight | 45kg |
| Flange Size | ISO 160 |
| Operating Temperature | 5-40°C |
| Noise Level | <50dB |
Applications
1. Semiconductor manufacturing 2. Surface analysis 3. Thin film deposition 4. Research and development
Key Features
1. High-speed operation 2. Low vibration and noise 3. Compact design 4. High reliability and durability
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Osaka Vacuum, Ltd. is a Japanese vacuum pump manufacturer founded in 1950. For over 75 years, the company has specialized in design, manufacturing, sales, and maintenance of vacuum pumps and systems. Its extensive product lineup includes magnetically levitated and ball-bearing turbo molecular pumps, dry vacuum pumps, roots pumps, oil-sealed rotary pumps, and vacuum systems, serving semiconductor, electronics, medical, aerospace, optical, and chemical industries worldwide.</p>
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