Interferometric Thickness Sensor WLI-VIS
Precisely Measures Transparent-Object Thickness by Interference between Surface-Reflected Beams.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Reference Distance [Parameter Figure _01 Product Table; WLI-VIS; Range Center at Focused Spot, Strongest Return Signal] | 66 mm |
| Operating Range [Parameter image_01 product parameter table; WLI-VIS] | ±3 mm |
| Measuring Angle [Parameter Figure _01 WLI-VIS;Specular Sample at Range Center;Maximum Sensor Tilt with Usable Return,Accuracy Drops near Limit] | ±3 ° |
| Spot Type [Parameter image_01 product parameter table; WLI-VIS] | Focused Spot Φ200μm |
| Thickness Measurement Range [Parameter Figure _01 Product Parameter Table; WLI-VIS; Refractive Index 1.5] | Approximately 2~200 |
| Repeatability [Parameter Figure _01 WLI-VIS;~60μm Quartz at Range Center;RMS Deviation of1000 Consecutive Data Sets] | 0.2 nm |
| Linearity Error [Parameter Figure _01 Product Table; WLI-VIS; ~60μm Quartz Thickness Deviation Tested within ±3mm of Range Center] | ±20 nm |
| Outer Diameter × Length [Parameter image_01 product parameter table; WLI-VIS] | Φ12×33 |
| Weight [Parameter image_01 product parameter table; WLI-VIS] | 20 g |
Key Features
Datasheet
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