Chromatic Confocal Displacement Sensor TS-RM6000
觉芯Email 's fully self-developed TS-CCS chromatic-confocal displacement sensors combine high performance, low cost and broad range for noncontact displacement/topography inspection in semiconductors, coating, films/sheets and motion control. Broad surface compatibility, environmental stability, repeatability/linearity and compact size are offered. Accuracy on transparent, highly reflective and nonsolid objects is described as much higher than other methods; simple setup gives precise topography. Controllers provide rich interfaces, live range/status display and single-, dual- or multiple-probe synchronous detection. The noncontact 3D scanning solution accurately measures rough, wet or tilted surfaces with minimal surface requirements. Compact probes with simple mounting combine with motion stages for 3D surface detection in coating, printed circuits and optical-surface inspection.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Measurement Range [Parameter image_01 optical-probe table; TS-RM6000] | 6 mm |
| Working Distance [Parameter image_01 optical-probe table; TS-RM6000] | ~17.5 mm |
| Repeatability [Parameter image_01 optical-probe table; TS-RM6000; stationary workpiece at the center of the measuring range; root-mean-square error over 1000 output displacement measurements; no signal averaging] | 160 nm |
| Repeatability [Parameter image_01 optical-probe table; TS-RM6000; stationary workpiece at the center of the measuring range; 10-sample moving average; root-mean-square error over 1000 output displacement measurements] | 50 nm |
| Repeatability [Parameter image_01 optical-probe table; TS-RM6000; stationary workpiece at the center of the measuring range; 512-sample moving average; root-mean-square error over 1000 output displacement measurements] | 8 nm |
| Linearity [Parameter image_01 optical-probe table; TS-RM6000; original μm and ‰F.S combination and parentheses retained as supplied, without calculated correction] | ±0.4μm (±0.2‰F.S) |
| Spot Size [Parameter image_01 optical-probe table; TS-RM6000] | 55 μm |
| Numerical Aperture [Parameter image_01 optical-probe table; TS-RM6000] | 0.225 |
| Maximum Tilt Angle [Parameter image_01 optical-probe table; TS-RM6000; maximum light-receiving angle for a workpiece made of specularly reflecting material] | 13 ° |
| Maximum Light-Collection Angle [Parameter image_01 optical-probe table; TS-RM6000; footnote 4: general diffusely reflecting workpiece, not equivalent to the tilt angle for a specular surface] | Up to 80 |
Applications
Key Features
Datasheet
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Supplier Information
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