NH Series Three Dimensional Surface Profilometer NH-3SPs
The NH series three dimensional surface profilometers from Mitaka Kohki, Japan, use laser autofocus technology and are widely used in semiconductor manufacturing and ultraprecision processing. Noncontact optical measurement provides fully automatic, highly accurate three dimensional workpiece profiles. Mitaka Kohki applies precision optics developed over many years in astronomy and medicine to industrial applications. Its noncontact three dimensional measurement equipment uses laser autofocus…
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Overview
Specifications
| Parameter | Value |
|---|---|
| XY Resolution | 0.01 μm |
| Z Resolution | 0.001 μm |
| XY Measurement Range | 150 mm |
| Z Measurement Range | 10 mm |
Key Features
Datasheet
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