A-TRI-VM-R5
Consistent, Reliable Motion Accuracy in a Compact, Rigid Platform with Ultrafine Positioning Resolution and Ample Payload Capacity. Ideal for Applications Requiring Complex Multiple-Degree-of-Freedom Motion in Limited Space.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Maximum Z-axis travel | ±5mm |
| Z-axis resolution | 4.88nm |
| Z-Axis Positioning Repeatability | ±0.2um |
| Position Stability | ±20nm |
| Maximum Speed [Z-Axis Section] | 5mm/s |
| Maximum Acceleration [Z-Axis Section] | 2m/s |
| θX/θY Maximum Travel | ±2.5° |
| θ-Axis Resolution | 0.15sec |
| θ-Axis Positioning Repeatability | ±1sec |
| Maximum Speed [θ-Axis Section] | 1°/s |
| Maximum Acceleration [θ-Axis Section] | 20°/s^2 |
| Counterweight Balancing Method | Pneumatic Constant-Force Counterbalance (Minimum Air Pressure 0.1MPa, Maximum Air Pressure 0.6MPa) |
| Maximum load | 20kg |
Datasheet
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Supplier Information
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