A-MCPA-XY
Magnetically preloaded aerostatic guides. A-MCPA-XY linear-motor stages combine air-bearing guides and linear motors in a compact, low-profile structure with coplanar XY marble and 100*100 or 200*200mm travel. Excellent accuracy and straightness suit tiny-step or ultraprecise planar scanning, precision optical alignment, assembly and machining.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Motor type | Three-Phase Iron-Core Motor |
| Grating resolution | 1vpp Analog, Interpolated Down to 1nm (Absolute Optional) |
| X-Axis Motor Thrust | Continuous 40N, Peak 90N |
| Y-Axis Motor Thrust | Continuous 40N*2, Peak 90N*2 |
| Upper-Axis No-Load Acceleration | 1.5G |
| Lower-Axis No-Load Acceleration | 1.5G |
| Minimum Step Size [With nanopwm or Linear Driver] | 10nm |
| Maximum Speed | 500mm/s |
| Maximum load | 12kg |
| Travel [source configuration 100x100] | 100 mm × 100 mm |
| Repeatability [source configuration 100x100] | ±0.1 um |
| Positioning Accuracy [source configuration 100x100] | ±0.2 um |
| Flatness [source configuration 100x100] | 1 um |
| Straightness [source configuration 100x100] | 0.5 um |
| Pitch [source configuration 100x100] | 10 urad |
| Yaw [source configuration 100x100] | 10 urad |
| Travel [source configuration 200x200] | 200 mm × 200 mm |
| Repeatability [source configuration 200x200] | ±0.1 um |
| Positioning Accuracy [source configuration 200x200] | ±0.2 um |
| Flatness [source configuration 200x200] | 1.5 um |
| Straightness [source configuration 200x200] | 1 um |
| Pitch [source configuration 200x200] | 20 urad |
| Yaw [source configuration 200x200] | 20 urad |
Key Features
Datasheet
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Supplier Information
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