A-HEX-S5.10.60-XXX
Consistent, Reliable Motion Accuracy in a Compact, Rigid Platform with Ultrafine Positioning Resolution and Ample Payload Capacity. Ideal for Complex Multiple-Degree-of-Freedom Motion in Confined Spaces and Wafer Leveling in Semiconductor Inspection.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Effective Travel [XY Axes] | ±30mm |
| Motor type [XY Axes] | Linear Motor |
| Grating resolution [XY Axes] | 4.88nm（1vpp） |
| Minimum Step Size [XY Axes] | 100nm |
| Repeatability [XY Axes] | ±0.2um |
| Positioning Accuracy [XY Axes] | ±1um |
| Maximum Speed [XY Axes] | 100mm/s |
| Effective Travel [θX θY Axes] | ±2.5deg |
| Motor type [θX θY Axes] | Stepper Motor |
| Grating resolution [θX θY Axes] | 4.88nm（1vpp） |
| Minimum Step Size [θX θY Axes] | 0.3sec |
| Repeatability [θX θY Axes] | ±1sec |
| Positioning Accuracy [θX θY Axes] | ±5sec |
| Maximum Speed [θX θY Axes] | 30deg/sec |
| Effective Travel [Z Axis] | ±5mm |
| Motor type [Z Axis] | Stepper Motor |
| Grating resolution [Z Axis] | 4.88nm（1vpp） |
| Minimum Step Size [Z Axis] | 100nm |
| Repeatability [Z Axis] | ±0.3um |
| Positioning Accuracy [Z Axis] | ±1um |
| Maximum Speed [Z Axis] | 15mm/s |
| Effective Travel [θZ Axis] | 360deg |
| Motor type [θZ Axis] | Direct-Drive Motor |
| Grating resolution [θZ Axis] | 0.04sec |
| Minimum Step Size [θZ Axis] | 0.1sec |
| Repeatability [θZ Axis] | ±1sec |
| Positioning Accuracy [θZ Axis] | ±5sec |
| Maximum Speed [θZ Axis] | 4rps |
| Maximum load | Horizontal Load 10kg; Contact Manufacturer for Load in Vertical Use |
| Maximum Mass | Complete Unit Weight 12kg |
Datasheet
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Supplier Information
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